VAT Group vacuum valves: gate, pendulum, transfer and control valves

Gate, pendulum, slit transfer, angle, control and all-metal valves from VAT Group, plus bellows and wafer lifts. Series selection and a quotation for your project.

VAT gate valves, series 01.0 to 19.2

A gate valve opens the full cross-section and has a low installation depth. The 14.0 series with the VATLOCK mechanism seals without friction at the gate seal, needs no lubricants and covers DN 63 to DN 400. It is rated for 200,000 cycles until first service.

VATLOCK, lubricant-free
Series 14.0: DN 63–400
200,000 cycles to first service
FKM gate and bonnet seals

VAT pendulum valves 16.2, 16.8, 65.3, 65.5

In a pendulum valve the gate moves out of the opening by rotation, and the split body allows in-place maintenance. The 16.8 series uses the VATLOCK mechanism. The 65.5 control valve comes in DN 250 with a 32-bit actuator controller and a body heater up to 120 °C.

Split body for in-place service
Series 65.5: DN 250
Body heater up to 120 °C
32-bit actuator controller

VAT transfer and slit valves

Rectangular transfer valves connect vacuum chambers, and substrates pass through them. In the 04.3 series with L-MOTION the gate carries vulcanized seals and the shaft feedthrough is sealed with welded metal bellows. The series is rated for 3 million cycles until first service.

Series 04.3 with L-MOTION
FKM or FFKM gate seals
Bellows-sealed shaft feedthrough
MONOVAT valves up to Gen 6

VAT angle and inline valves

Angle, inline and cylinder valves serve pumping, process and venting duties. The 24.4 series with ISO-KF and ISO-K flanges comes normally closed, normally open or double acting, and sizes up to DN 800 have been produced. The 29.0 series pumps and vents without turbulence.

Series 24.4: up to DN 800
ISO-KF and ISO-K flanges
NC, NO or double acting
Soft pumping: series 29.0

VAT butterfly control valves

The 61.3 butterfly valve controls downstream pressure in CVD and ALD and stays operational under high particle loads. Its motion controller acts in 0.1 s, and pressure control is rated for 2 million cycles until first service. The 61.6 and 95.3 series combine control and isolation.

Controller response 0.1 s
2 million control cycles
FKM standard, FFKM on request
Adaptive and fixed PI control

VAT all-metal and fast closing valves

VAT all-metal valves have no elastomers in process-contacting areas: sealing is metal on metal, with high bakeout temperatures and radiation resistance. The 75.0 fast closing valves and 77.1 shutters protect accelerators and storage rings from air inrush; 79.0 stops the beam.

No elastomers in process area
Metal-to-metal sealing
Accelerator protection: 75.0
Beam stopper: series 79.0

VAT gas dosing and relief valves

The 21.1, 62.7 and 62.8 valves deliver a reproducible gas flow into a vacuum chamber, the 22.0 diaphragm valve handles gases and liquids, and the 59.0 variable leak valve serves UHV systems. The 21.2 valve protects against overpressure, and the 21.3 controls venting.

Gas dosing: 21.1, 62.7, 62.8
Diaphragm valve 22.0
All-metal leak valve 59.0
Pressure relief valve 21.2

VAT bellows, wafer lifts and flanges

VAT edge welded bellows serve as flexible sealing elements and vibration compensating connectors and are made in Switzerland in ISO class 5-8 cleanrooms. The 98.0 wafer lift system uses three lifts driven by BLDC motors with brake and encoder, with a 15, 30 or 60 mm stroke.

ISO class 5-8 cleanrooms
Lift stroke 15, 30 or 60 mm
ISO class 6 gaskets
ISO-KF, ISO-K, ISO-F, CF flanges

How to choose a VAT vacuum valve

Selection starts with the valve duty.

For isolating chambers and pumps VAT offers gate and pendulum valves, for moving substrates between chambers slit transfer valves, for pumping and venting angle and inline valves, and for pressure control butterfly and pendulum control valves with an integrated controller.

All-metal valves serve UHV, bakeout and radiation conditions, gas dosing and leak valves feed process gas, and pressure relief and venting valves protect the system.

Gate valves for isolation

A gate valve opens the full cross-section and has a low installation depth. The 14.0 series with VATLOCK seals without friction at the gate seal, needs no lubricants, covers DN 63 to DN 400 and is rated for 200,000 cycles until first service.

Actuation is manual, pneumatic or 3-position pneumatic, with a 24 VDC solenoid valve as standard. Bonnet and gate seals are FKM.

Pendulum valves and pressure control

The 16.2 series uses single acting or 3-position pneumatic actuation, and the 16.8 series uses the VATLOCK mechanism. The 65.5 control valve in DN 250 is built for corrosive etching with high process pressure and low flows; a patented pressure bar presses the gate onto the seat.

The 61.3 butterfly valve controls pressure in CVD and ALD processes, its motion controller acts in 0.1 s, and pressure control is rated for 2 million cycles. Controllers connect via RS232, RS485, DeviceNet, Ethernet, Profibus, CC-Link or EtherCAT.

Transfer valves

Transfer valves with a rectangular cross-section connect vacuum chambers, and substrates pass through them. The 04.3 series with L-MOTION has vulcanized gate seals, a bellows-sealed shaft feedthrough and is rated for 3 million cycles until first service.

MONOVAT 02.4 valves serve display and PV production systems up to Gen 6.

All-metal valves for UHV

All-metal valves have no elastomers in process-contacting areas, sealing is metal on metal, and high bakeout temperatures and radiation are allowed. The 57.0 and 57.1 angle valves are built for extreme temperature and radiation.

The 75.0 fast closing valves and 77.1 shutters protect accelerators and storage rings from air inrush, and the 79.0 series stops the beam in accelerators and synchrotrons.

Components and maintenance

Besides valves VAT makes edge welded bellows, 98.0 wafer lifts with 15, 30 or 60 mm stroke, ISO-KF, ISO-K, ISO-F and CF flange connections, and vacuum modules. A compressed air safety accumulator for the 09.1, 10.8, 11.1 and 12.1 series moves the valve to a defined emergency position.

The manufacturer keeps spare parts available long term regardless of model and offers upgrades for better particle performance. The valve code on the nameplate defines the seal kit and actuator.

The manufacturer VAT Group

VAT Group is a Swiss maker of vacuum valves, in business for 60 years and listed on the Swiss Stock Exchange since 2016. Its plants are in Switzerland, Malaysia and Romania, with sales and service offices in 29 countries.

Series, size, actuator and seal material are stated in the quotation for each project.

VAT Group and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of VAT Group and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.