Agilent Vacuum Technologies Pumps, Leak Detectors, and Hardware

Turbomolecular, dry scroll, sputter ion, rotary vane, and diffusion vacuum pumps, HLD helium leak detectors, vacuum gauges, and ConFlat/KF hardware from Agilent Vacuum Technologies (Varian Vacuum) selected by part number.

TwisTorr (FS / OS) and Turbo-V Turbomolecular Vacuum Pumps

High-vacuum pumps of the TwisTorr FS family (74FS, 84FS, 305FS, 305-IC, 404FS, 704FS, 804FS) and Turbo-V range (551, 1001, 2300, 3K-G) serve mass spectrometers, accelerators, coating chambers, and semiconductor tools down to 10⁻¹⁰ mbar, plus TPS stations.

Patented TwisTorr molecular drag stages with high compression for hydrogen and helium
Agilent Floating Suspension (FS) hybrid ceramic bearing system minimizing rotor vibration
Onboard 24 VDC controllers, 19-inch AG Rack drive units, and integrated IC electronics
Inlet flanges in ConFlat (CF) and ISO-K/F standards with air and water cooling kits

IDP and TriScroll Oil-Free Dry Scroll Vacuum Pumps

Oil-free dry scroll backing pumps of the hermetic IDP series (IDP-3, IDP-7, IDP-10, IDP-15) and two-stage TriScroll series (TriScroll 300, TriScroll 600, including inverter versions) eliminate hydrocarbon backstreaming in electron microscopes, glove boxes, and cryostats.

Hermetic gas path in IDP pumps isolating bearings and motor from the vacuum chamber
Pumping speeds from 3 to 15 m³/h on IDP models and up to 25.2–30 m³/h on TriScroll 600
Preventive service simplified to scheduled replacement of composite axial tip seals
Tip seal replacement kits (IDP3TS, IDP7TS, IDP10TS, IDP15TS, PTSS0300MK, PTSS0600MK)

VacIon Plus Ion Getter Pumps, StarCell Elements, and 4UHV Controllers

Sputter ion getter pumps of the VacIon Plus family (20 to 500 L/s models and miniature 0.2–10 L/s pumps) generate vibration-free Ultra-High Vacuum (UHV) and Extreme High Vacuum (XHV) down to 10⁻¹¹ mbar for particle accelerators, beamlines, and surface physics chambers.

Three cathode element designs: Diode for active gases, Noble Diode, and StarCell
Open-cell StarCell titanium cathodes for noble gases (argon, helium), hydrogen, methane
Multi-channel 4UHV high-voltage controllers (up to 4 pumps) and compact IPC Mini units
Titanium sublimation pumps (TSP), CombiNEG getter modules, heaters, and HV cables

DS Rotary Vane Pumps and VHS / HS Vapor Diffusion Vacuum Pumps

Two-stage oil-sealed rotary vane pumps of the DS series (DS 40M, DS 102, DS 202, DS 302, DS 402, DS 602) and vapor diffusion pumps of the VHS (VHS-4, VHS-6, VHS-10, VHS-250, VHS-400) and HS (HS-2, HS-16, HS-20, HS-32) families operate in vacuum furnaces and coaters.

DS backing pumps with 2 to 30 m³/h displacement, forced lubrication, and gas ballast
VHS and HS fractionating diffusion pumps providing speeds from 150 to 32,000 L/s
Minor and major shaft seal overhaul kits, rotor vanes, and exhaust oil mist filters
Replacement boiler heaters for VHS/HS pumps, water-cooled baffles, and DS19 pump oil

HLD, VS, 979, and PHD-4 Helium Mass Spectrometer Leak Detectors

Helium mass spectrometer leak detectors of the HLD series (PR02, PD03, BD08, BR15, BD30, MR15, MD30, and C15 component unit) alongside legacy VS, 979, 959, and portable PHD-4 systems verify leak tightness of vacuum chambers, heat exchangers, and cryogenic vessels.

Benchtop, mobile cart, and component units with rotary vane or dry scroll backing pumps
Detectable helium leak rate down to 5×10⁻¹² mbar·L/s in vacuum mode plus sniffer mode
Dual-iridium-filament ion sources, internal calibrated helium leaks, and wireless remotes
Service parts: sniffer probes, helium spray guns, calibrated leaks, and inlet filters

FRG / PVG / PCG Vacuum Gauges, XGS-600 Controllers, and ConFlat / KF / ISO Hardware

We help select Agilent active vacuum gauges and rack controllers (XGS-600, RGC-100/150) together with high-vacuum valves, gate valves, flexible metal bellows, and flange hardware in ConFlat (CF), ISO-KF (NW), and ISO-K/F standards for industrial vacuum systems.

Full-range FRG-700/702 (inverted magnetron) and FRG-720/730 (Bayard-Alpert) active gauges
PVG-500/550 Pirani transducers, PCG-750 gauges, CDG-500 diaphragm gauges, and UHV-24 tubes
All-metal bakeable UHV valves Series 54, block valves Series 26, and 951-5106 leak valves
CF/KF/ISO fittings, OFHC copper gaskets, Viton centering rings, cables, and Torr Seal resin

Varian Vacuum engineering heritage within Agilent Technologies

Agilent Vacuum Technologies traces its engineering heritage to Varian Vacuum Technologies (integrated into Agilent in 2010), the pioneer that invented the sputter ion getter pump (VacIon) in 1957 and established the industry-standard ConFlat (CF) ultra-high-vacuum flange.

Primary development and manufacturing of turbomolecular, ion, diffusion, and rotary vane pumps are based in Leinì (Turin, Italy), while dry scroll pumps and helium mass spectrometer leak detectors are engineered in Lexington, Massachusetts, USA.

When sourcing replacement units and maintenance kits for installed vacuum equipment, nine-digit and alphanumeric part numbers remain cross-compatible across legacy Varian nameplates and current Agilent Vacuum Technologies identification labels.

TwisTorr FS turbomolecular pump architecture and TPS pumping stations

Turbomolecular pumps in the TwisTorr 74FS, 84FS, 305FS, 404FS, 704FS, and 804FS series combine high-speed angled rotor blades with patented TwisTorr molecular drag stator channels.

This stage geometry generates high compression ratios for light gases (hydrogen and helium) and tolerates higher foreline backing pressures, allowing pairing with compact oil-free IDP dry scroll pumps.

The Agilent Floating Suspension (FS) hybrid ceramic bearing assembly reduces vibrational transmission to electron microscope columns or mass spectrometer analyzers and eliminates routine bearing lubrication.

Turnkey benchtop and mobile pumping stations in the TPS-compact and TPS-mini families integrate TwisTorr turbo pumps with dry scroll backing pumps.

Comparing IDP and TriScroll dry scroll pumps for maintenance kit selection

Agilent oil-free scroll pumps are divided into two structural families: single-sided hermetic IDP pumps (IDP-3, IDP-7, IDP-10, IDP-15 rated from 3 to 15 m³/h) and double-sided two-stage TriScroll pumps (TriScroll 300 and TriScroll 600 rated up to 15–30 m³/h).

In IDP pumps, bearings and motor windings are completely isolated from the vacuum gas path by a hermetic bellows seal.

Routine preventive service consists of replacing composite axial tip seal strips (tip seal kits IDP3TS, IDP7TS, IDP10TS, IDP15TS for IDP models and PTSS0300MK, PTSS0600MK for TriScroll units).

High-hour TriScroll pumps are also supported by comprehensive major maintenance kits containing replacement bearings and O-ring seals.

VacIon Plus sputter ion pump element configurations for UHV and XHV

For hydrocarbon-free Ultra-High Vacuum and Extreme High Vacuum (down to 10⁻¹¹ mbar) without mechanical vibration, VacIon Plus sputter ion pumps utilize three cathode element configurations tailored to the gas load: conventional titanium Diode elements for active gases (oxygen, nitrogen, carbon oxides), bimetallic titanium-tantalum Noble Diode elements, and universal StarCell elements.

The open star-shaped cathode geometry of StarCell elements prevents plate warping during long-term operation and sustains high pumping speed and capacity for noble gases (argon and helium) as well as hydrogen and methane.

Titanium sublimation pumps (TSP) and CombiNEG non-evaporable getter modules complement ion pumps in the 10⁻¹⁰ to 10⁻¹¹ mbar regime.

DS oil-sealed rotary vane pumps and VHS / HS vapor diffusion pumps

High-gas-load industrial furnaces, vacuum brazing chambers, and optical coaters rely on two-stage oil-sealed rotary vane pumps of the DS series (DS 40M, DS 102, DS 202, DS 302, DS 402, DS 602) paired with vapor diffusion pumps of the VHS (VHS-4, VHS-6, VHS-10, VHS-250, VHS-400) and HS (HS-2, HS-16, HS-20, HS-32) series.

DS pumps feature forced oil lubrication, gas ballast valves, and anti-suckback protection.

For rotary vane pump overhauls we help select minor and major shaft seal kits, rotor vanes, flapper valves, exhaust oil mist eliminators, and foreline zeolite traps.

For VHS and HS diffusion pumps we specify replacement boiler crush-plate and cartridge heaters, thermal switches, water-cooled baffles, sight glasses, and vacuum fluids.

Nameplate identification rules for ordering vacuum pumps and spare parts

To ensure accurate selection of interchangeable assemblies, controllers, and cables for Agilent and legacy Varian vacuum equipment, please provide the nine-digit or alphanumeric Part Number / Model Number and serial number from the unit nameplate.

For turbomolecular and ion pumps, specify the inlet and foreline flange standard (ConFlat CF, ISO-K, or ISO-KF), cooling method, and controller voltage.

When requesting consumables for HLD / VS / 979 helium leak detectors or XGS-600 / FRG / PVG / CDG vacuum gauges, include a photo of the instrument label and connector interface.

We verify the service part code against manufacturer documentation and prepare a commercial quotation with lead time and export logistics details.

Agilent Vacuum Technologies and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of Agilent Vacuum Technologies and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.