Edwards Vacuum Equipment & Spares: nXDS Scroll, EM/RV Vane, nEXT Turbomolecular, GXS Screw & EH Boosters

Supply industrial and scientific vacuum machinery from Edwards Vacuum (Atlas Copco Group, UK): nXDS and XDS dry scroll pumps, EM and RV rotary vane pumps, nEXT and maglev STP turbomolecular pumps, GXS industrial dry screw packages, EH/HV mechanical boosters, vacuum transmitters, and genuine overhaul kits.

Edwards nXDS and XDS Dry Scroll Vacuum Pumps

Edwards nXDS and XDS dry scroll vacuum pumps are engineered to deliver truly clean, oil-free vacuum performance across analytical instruments, mass spectrometry, electron microscopy, glove boxes, and thin-film coating load-locks.

The nXDS range (nXDS6i, nXDS10i, nXDS15i, and nXDS20i) achieves pumping speeds from 6.2 to 22.0 m³/h with ultimate vacuum down to 7×10⁻³ mbar, preventing any hydrocarbon vapor contamination in the vacuum envelope.

Integrated smart inverter motor drive providing worldwide multi-voltage operation (100–240 V) and precision rotational speed regulation
Patented dynamic bearing shield technology completely segregating lubricated bearing assemblies from process vacuum chambers
Extended tip seal service lifespan offering between 25,000 and 35,000 hours of continuous trouble-free operational duty
Specialized nXDS-R derivatives for noble gas recycling and chemically resistant nXDS-C versions for aggressive laboratory vapors

Edwards EM and RV Oil-Sealed Rotary Vane Vacuum Pumps

Two-stage oil-sealed rotary vane vacuum pumps from Edwards, encompassing the heavy-duty EM series (E2M1.5, E2M28, E2M40, E2M80, E2M175, E2M275) and laboratory RV series (RV3, RV5, RV8, RV12), deliver proven rugged roughing performance for vacuum metallurgy, heat treatment furnaces, refrigeration

degassing, and freeze drying. The range provides continuous pumping capacities up to 275 m³/h and achieves ultimate pressures down to 1×10⁻³ mbar.

Positive pressure oil lubrication circuitry driven by an integral gear pump ensuring thorough vane wetting and continuous hydrodynamic sealing
Selectable dual-mode gas ballast valve facilitating the clean exhaust of condensable water vapor and volatile solvent fractions
High-integrity built-in oil suck-back protection preventing lubricant migration upstream during sudden power interruptions
Standardized ISO-KF and ISO-K connection flanges allowing straightforward integration of oil mist separators and dust filters

Edwards nEXT and STP Turbomolecular High Vacuum Pumps

Edwards high-vacuum turbomolecular pumping platforms comprise the modular nEXT series (nEXT85, nEXT240, nEXT300, nEXT400, nEXT730, nEXT930, nEXT1230) and the advanced magnetically levitated STP series (STP-iXA2206, STP-iXA3306, STP-iXA4506), generating contamination-free high and ultra-high vacuum

down to 10⁻¹⁰ mbar. Pumping speeds for nitrogen scale from 85 to 4,500 L/s for semiconductor lithography, particle beam lines, and analytical instruments.

Advanced nEXT hybrid bearing geometry: permanent upper magnetic suspension paired with lower ceramic ball bearings
Flagship STP 5-axis active magnetic levitation system completely eliminating mechanical contact, wear debris, and hydrocarbon lubricants
Onboard microprocessor drive units facilitating direct bus integration via RS232, RS485, Profibus, and DeviceNet protocols
Outstanding compression ratio performance for light molecular mass species (H₂, He) with universal spatial mounting orientation

Edwards GXS, EDP, and CDX Dry Screw Vacuum Pumps

Edwards industrial dry screw vacuum machines, featuring the high-efficiency GXS series (GXS160, GXS250, GXS450, GXS750), the corrosive-duty EDP family (EDP80, EDP160, EDP250), and the heavy chemical CDX1000, cater to aggressive industrial processes containing solvent vapors, particulates, or

reactive chemical streams. When matched with GXMB Roots boosters, system throughput reaches up to 3,450 m³/h from atmosphere to 5×10⁻⁴ mbar.

Patented variable-pitch tapered screw profiles compressing vapors smoothly along the thermal gradient, preventing localized thermal stress
Robust corrosion-resistant wetted alloys, full ATEX explosion-proof certification, and optimized handling of hazardous chemical compounds
Smart closed-loop temperature management coordinating casing cooling jacket temperatures and automated nitrogen (N₂) purge flow rates
Up to 30% lower energy consumption compared to traditional steam ejectors, liquid ring pumps, and standard oil-lubricated installations

Edwards EH and HV Mechanical Roots Booster Pumps

Edwards mechanical Roots vacuum booster pumps, including the EH series (EH250, EH500, EH1200, EH2600, EH4200) and large-scale HV series (HV8000, HV14000, HV30000), dramatically enhance roughing speed and ultimate vacuum capability when paired with backing dry screw, rotary vane, or liquid ring

pumps. Pumping throughput scales up to 30,000 m³/h within the critical operating pressure bracket of 10⁻⁴ to 100 mbar.

Exclusive hydrokinetic fluid drive mechanism automatically decoupling and slipping torque during high differential pressure regimes
Permits simultaneous direct startup alongside backing roughing pumps straight from atmospheric pressure (1,013 mbar)
Eliminates the necessity for differential pressure sensors, auxiliary bypass ducting, and expensive blow-off relief valves
Accelerates pump-down cycle intervals on massive process vessels and vacuum furnaces by up to 50% without motor thermal overload

Edwards Vacuum Gauges, Active Transmitters (APG, AIM, WRG), and TIC Controllers

Edwards measurement instruments and active transmitter heads monitor system pressure across the complete vacuum spectrum from atmospheric level (1,000 mbar) down to ultra-high vacuum (10⁻¹⁰ mbar).

The portfolio incorporates APG100/200 Pirani transmitters, AIM inverted magnetron cold cathode gauges, WRG wide-range hybrid gauges, and modular TIC/ADC digital display and instrument controllers.

WRG Wide Range Gauges: seamless integration of Pirani thermal conductivity and cold cathode ionization across 1,000 to 10⁻⁹ mbar
Standardized active gauge outputs providing linearized or logarithmic 0–10 V DC signal transmission with push-button zero calibration
Multichannel TIC controllers managing turbomolecular pumps, foreline backing pumps, and up to three active pressure transmitters concurrently
Gas-independent ASG capacitance diaphragm gauges delivering precise absolute total pressure readings unaffected by vapor composition

Edwards Clean & Overhaul Seal Kits, Ultragrade Oils, and Foreline Traps

To safeguard long-term nameplate vacuum performance and uptime of Edwards pumping installations, we supply factory-original spare components, scheduled maintenance service kits, and vacuum fluid formulations.

Offerings include nXDS/XDS scroll tip seal replenishment kits, EM/RV Clean & Overhaul seal packages, EMF10/20 oil mist exhaust filters, and high-purity Ultragrade 15, 19, 20, and 70 lubricants.

Certified Clean & Overhaul major kits containing precision FKM fluoroelastomer shaft seals, viton O-rings, and tempered exhaust valve springs
Hydro-treated Ultragrade vacuum oils engineered with exceptionally low vapor pressure and supreme thermal oxidative breakdown resistance
Inert perfluoropolyether (PFPE) fluids including Fomblin and Krytox for safe oxygen enrichment and hostile chemical vapor service
Foreline absorption traps equipped with activated alumina or molecular sieve zeolite cartridges preventing upstream lubricant back-migration

Edwards Semiconductor Dry Vacuum Pumps (iXH, iXL) and Exhaust Gas Abatement Systems

Edwards specialized semiconductor dry vacuum platforms (iXH, iXL, iGX) alongside thermodynamic point-of-use gas abatement installations drive mission-critical microelectronics manufacturing, including dielectric etch, plasma-enhanced chemical vapor deposition (PECVD), ion implantation, and flat

panel display production lines.

iXH harsh-duty dry pumps: specifically fortified to tolerate heavy particulate condensation and severe corrosive chemical chemistries
Energy-optimized iXL series: compact footprint systems tailored for rapid load-lock evacuation with minimal electrical and nitrogen utility draws
Direct integration capability with the FabWorks predictive plant-monitoring software ecosystem for real-time vibration and thermal telemetry
Point-of-use thermal and combustion gas abatement units decomposing toxic pyrophoric precursors and hazardous greenhouse process gases

What We Do Not Confirm for Edwards Vacuum

To prevent misunderstandings during procurement and quotation processing for Edwards Vacuum equipment and spare parts, we explicitly define operational boundaries and non-confirmed specifications:

We do not supply cardiovascular medical devices from Edwards Lifesciences, apparel textiles, or musical instruments from unrelated brands sharing the same name
We do not confirm component interchangeability or overhaul kit selection based solely on verbal descriptions without an official nameplate photograph or Edwards part number
We do not conduct retail cash transactions with private individuals; all transactions are executed strictly B2B under corporate contracts and bank wire transfers
We do not guarantee fixed domestic inventory pricing: exact unit pricing, supply routes, and delivery timeframes are confirmed within formal commercial quotations

Edwards Vacuum Nameplate Verification, Part Number Identification & Selection

Edwards Vacuum (founded in 1919 in the United Kingdom by physicist F.D.

Edwards, headquartered in Burgess Hill, West Sussex, UK; operating as the Vacuum Technique core business area within Atlas Copco Group) is a premier global innovator in high-vacuum and ultra-high-vacuum technology, exhaust gas management, and industrial roughing equipment.

To verify compatibility and receive an official commercial offer, please specify the exact equipment series and model code (such as nXDS6i, nXDS10i, nXDS15i, nXDS20i, E2M28, E2M40, E2M80, RV5, RV12, nEXT85, nEXT300D, STP-iXA2206, GXS250, EDP160, EH1200, APG100, WRG, TIC Controller), motor electrical

voltage rating, and factory serial number.

When sourcing maintenance seal kits, scroll tip seal replacement kits, oil mist exhaust filters, or specialty lubricants, attaching a clear photo of the original Edwards nameplate guarantees accurate factory bill-of-materials cross-referencing.

Edwards nXDS and XDS Oil-Free Dry Scroll Vacuum Pumps

Edwards nXDS and XDS dry scroll vacuum pumps are engineered to deliver clean, hydrocarbon-free roughing vacuum across mass spectrometers, electron microscopes, surface physics spectrometers, and load-lock chambers.

The flagship nXDS series delivers pumping speeds from 6.2 to 22.0 m³/h with ultimate base pressure down to 7×10⁻³ mbar.

Featuring an intelligent onboard inverter motor drive, the pump maintains stabilized rotational speed and full pumping performance across universal single-phase input voltages (100–240 V, 50/60 Hz).

Advanced dynamic bearing isolation technology completely seals lubricated bearings away from the process gas flow.

We supply complete dry scroll pump units, original tip seal replacement kits, inverter drive controllers, cooling fans, and ISO-KF vacuum fittings.

Edwards EM and RV Two-Stage Oil-Sealed Rotary Vane Pumps

The rugged EM series industrial rotary vane pumps (E2M1.5, E2M28, E2M40, E2M80, E2M175, E2M275) and compact analytical RV series (RV3, RV5, RV8, RV12) provide proven continuous vacuum roughing for metallurgy, heat treatment furnaces, refrigeration charging, and vacuum drying plants with capacities

up to 275 m³/h and ultimate pressure down to 1×10⁻³ mbar.

A positive-displacement internal oil gear pump ensures forced pressure lubrication of vanes and bearings even under heavy gas ballast and high inlet pressure conditions. The dual-mode gas ballast valve allows high water-vapor tolerance without oil emulsion contamination.

We supply complete EM and RV pumping assemblies, EMF oil mist eliminators, replacement vanes, sight glasses, and Clean & Overhaul seal kits.

Edwards nEXT and Maglev STP Turbomolecular High Vacuum Pumps

Edwards turbomolecular pumping systems encompass the modular hybrid-bearing nEXT family (nEXT85, nEXT240, nEXT300, nEXT400, nEXT730, nEXT930, nEXT1230) and the ultra-clean 5-axis magnetically levitated STP series (STP-iXA2206, STP-iXA3306, STP-iXA4506), reaching ultimate pressures down to 10⁻¹⁰ mbar

and nitrogen pumping throughput up to 4,500 L/s.

The STP series completely eliminates mechanical bearings, wear debris, and lubricating fluids by utilizing active five-axis magnetic suspension, making it the industry standard for semiconductor wafer processing and extreme ultra-clean scientific installations.

The nEXT platform pairs upper permanent magnetic suspension with high-precision ceramic ball bearings.

We provide complete turbomolecular pumps, TIC and TAC digital drive controllers, interconnecting cables, high-vacuum gate valves, and inlet debris screens.

Edwards GXS, EDP, and CDX Industrial Dry Screw Vacuum Pumps

Edwards GXS industrial dry screw pumps (GXS160, GXS250, GXS450, GXS750), corrosion-resistant chemical EDP pumps (EDP80, EDP160, EDP250), and chemical process CDX1000 machines handle condensable vapors, particulates, and aggressive gases across chemical, pharmaceutical, and solar cell manufacturing.

Patented variable-pitch screw rotors smooth gas compression along an optimized thermal gradient, preventing localized thermal cracking and lowering energy consumption by up to 30%.

In combination with GXMB mechanical boosters, pumping speeds reach 3,450 m³/h from atmospheric pressure down to 5×10⁻⁴ mbar.

We supply complete dry screw packages, nitrogen purge control skids, solvent flush kits, and genuine temperature transmitter sensors.

Edwards EH and HV Mechanical Roots Booster Pumps with Hydrokinetic Drive

Edwards EH series (EH250, EH500, EH1200, EH2600, EH4200) and large-scale HV series (HV8000, HV14000, HV30000) mechanical Roots vacuum boosters scale roughing speed and ultimate vacuum depth when coupled with primary dry screw, rotary vane, or liquid ring pumps, achieving throughputs up to 30,000

m³/h.

The proprietary hydrokinetic fluid drive automatically slips and decouples torque during high differential pressure regimes, enabling direct simultaneous startup of booster and backing pump from atmospheric pressure without auxiliary bypass lines or differential pressure switches, cutting pump-down

times by up to 50%.

We deliver complete Roots booster pumps, hydrodynamic fluid couplings, shaft seal cartridges, and overhaul bearing kits.

Edwards Vacuum Gauges, Active Transmitters (APG, AIM, WRG) and TIC Controllers

Edwards measurement instruments deliver high-accuracy vacuum tracking from atmospheric pressure (1,000 mbar) down to ultra-high vacuum (10⁻¹⁰ mbar).

The line includes APG100/200 Pirani transmitters, AIM inverted magnetron cold cathode gauges, WRG hybrid wide-range gauges, and ASG capacitance diaphragm absolute pressure sensors.

Modular TIC (Turbo and Instrument Controller) and ADC digital display units feature graphic LCD panels, configurable setpoint alarm relays, and digital RS232/RS485 interfaces for seamless integration into supervisory DCS and PLC control loops.

We supply active transmitter heads, calibration cables, replacement sensor tubes, and multichannel instrument controllers.

Edwards Clean & Overhaul Seal Kits, Ultragrade Vacuum Oils and Traps

To safeguard factory pumping specifications and uptime, Edwards supplies certified Clean & Overhaul kits containing precision FKM shaft seals, O-rings, and exhaust valve components, as well as genuine tip seal replacement kits for nXDS and XDS scroll pumps.

Operating reliability is backed by highly refined Ultragrade 15, 19, 20, and 70 hydrocarbon vacuum oils with minimal saturation vapor pressure and supreme thermal stability, complemented by inert Fomblin PFPE fluids for reactive chemical and oxygen enrichment services.

We supply factory-sealed oil containers, EMF oil mist separators, foreline zeolite sorption traps, and complete maintenance consumable sets.

Edwards Semiconductor Harsh-Duty Dry Pumps (iXH, iXL) and Abatement Systems

Edwards specialized semiconductor dry pumps (iXH, iXL, iGX) and integrated exhaust gas abatement units drive mission-critical microelectronics manufacturing, including dielectric etch, PECVD, ion implantation, and flat-panel display production lines.

The equipment couples with thermal and combustion point-of-use scrubbers to safely destroy pyrophoric, toxic, and global-warming fluorinated gases with up to 99.99% destruction and removal efficiency (DRE).

We supply cleanroom vacuum pumping units, FabWorks predictive telemetry interface modules, and scrubber spare consumables.

Direct International B2B Supply of Edwards Vacuum Equipment and Spares

SpareX coordinates direct B2B supply of original Edwards Vacuum machinery, spare parts, and consumable materials for industrial enterprises, scientific laboratories, and process facilities worldwide.

We handle technical part number validation, factory supply coordination, international freight forwarding, and customs clearance with complete technical documentation.

Equipment configurations, manufacturing lead times, and export pricing for Edwards Vacuum products are calculated individually upon technical inquiry; public retail price lists are not published by the manufacturer. We operate as an independent international supplier of industrial vacuum equipment.