KYKY Technology Vacuum Pumps and Systems

KYKY Technology is a Beijing maker of vacuum equipment founded in 1958: grease, oil-lubricated and magnetically levitated turbomolecular pumps, rotary vane pumps, pump stations, gate valves, leak detectors and gauges.

FF grease-lubricated turbomolecular pumps

KYKY FF-100/110, FF-160/700, FF-200/1300 and FF-250/2000 pumps run on self-sealed grease-lubricated ceramic bearings, mount in any orientation and need maintenance once every 3–5 years. FF-250/2000 pumps 2000 L/s of N2 at 24,000 rpm; FF-100/110 gives 110 L/s at 42,300 rpm.

Ceramic bearings
Maintenance every 3–5 years
N2 speed 110–2000 L/s
FF-250/2000: TCDP-II controller

FF-63/80, FF-100/150 and FF-100/300 instrument pumps

Compact KYKY turbomolecular pumps for mass spectrometers and surface analysis instruments. They work with multiple backing pumps, mount in any position and have adjustable rotating speed. FF-63/80 runs at 72,000 rpm, and FF-100/300 pumps 260 L/s of N2.

Up to 72,000 rpm
N2 speed up to 260 L/s
Any mounting position
TCP-100 or TCP-240 controller

FF-160/620 and F-400/3500B oil-lubricated pumps

KYKY oil-lubricated turbomolecular pumps work well under high temperature and dust and serve ion implantation, PVD, CVD, electron beam welding and vacuum furnaces. FF-160/620 pumps 600 L/s of N2 at 36,000 rpm; F-400/3500B gives 3500 L/s at 13,500 rpm.

N2 speed 600–3500 L/s
F-400/3500B: DN400 ISO-K inlet
F-400/3500B weight 130 kg
High temperature and dust

CXF magnetically levitated turbomolecular pumps

KYKY CXF-200/1401E, CXF-250/2301E and CXF-320/3001E carry the rotor on a 5-axis active magnetic bearing with no lubrication. The rotor combines aluminum alloy and carbon fiber, and a heater controls pump temperature for etch gases. Speed is 1400–3200 L/s at 24,000–33,000 rpm.

5-axis magnetic bearing
Air speed 1400–3200 L/s
24,000–33,000 rpm
Weight with controller 51–75 kg

RV-2 to RV-24 rotary vane pumps

KYKY RV direct-drive high speed vane pumps run alone or back diffusion, roots and molecular pumps. They give 2–24 L/s at 50 Hz and 1420 rpm with 4×10⁻² Pa ultimate pressure. An anti-oil return check valve, pressure oil circulation and a gas ballast valve are built in.

2–24 L/s at 50 Hz
1420 rpm
Oil charge 1.1–6.5 L
Noise 50–58 dB

FJ-80, FJ-110, FJ-620 and FJ-700 pump stations

KYKY stations combine a turbomolecular pump and a mechanical pump on a frame with electrical control and water cooling protection. FJ-80 is built on FF-63/80, gives 62 L/s and weighs 21 kg; FJ-620 uses RV-6 and a ZDF-11B5 gauge, with leak rate ≤1×10⁻⁹ Pa·m³/s.

Speed 62–700 L/s
FJ-80 weight 21 kg
FJ-700 weight 135 kg
FJ-620 supply 380 V

CC, CCD and CCQ ultrahigh vacuum gate valves

KYKY gate valves DN35–DN400 come with manual (CC), electric (CCD) and pneumatic (CCQ) drive. Body and plate are 304 stainless steel, the drive uses 316L welded bellows and the plate seals with a fluorine rubber gasket. Leak rate is ≤1.3×10⁻¹⁰ Pa·m³/s, baking up to 150 °C.

DN35–DN400
Leak rate ≤1.3×10⁻¹⁰ Pa·m³/s
316L welded bellows
Baking up to 150 °C

ZQJ-2000 and ZQJ-3200 helium leak detectors

KYKY ZQJ-2000 detects leaks down to 2×10⁻¹¹ Pa·m³/s at inlet pressure up to 1000 Pa, weighs 80 kg and takes an oil or dry foreline pump. Microprocessor-controlled ZQJ-3200 reaches 5×10⁻¹³ Pa·m³/s in vacuum mode, also works in sniffing mode and weighs 44 kg.

ZQJ-3200: 5×10⁻¹³ Pa·m³/s
ZQJ-3200 inlet up to 2500 Pa
Response ≤2 s
ZQJ-2000 weight 80 kg

Selecting a KYKY pump by task

For mass spectrometers and surface analysis instruments KYKY builds the FF-63/80, FF-100/150 and FF-100/300 instrument pumps with an integrated drive module.

Solar cells, Low-E and ITO glass coating, accelerators, plasma systems and leak detection use grease-lubricated pumps from FF-100/110 (110 L/s) to FF-250/2000 (2000 L/s of N2).

High temperature and dust, vacuum furnaces and electron beam welding call for the oil-lubricated FF-160/620 and F-400/3500B. Corrosive gases in etch, CVD, PVD and ion implantation are handled by CXF magnetically levitated pumps (1400–3200 L/s) with heating and N2 shaft purge.

RV-2 to RV-24 rotary vane pumps give the fore-vacuum, and FJ stations put everything on one frame.

Gate valves, leak detectors and gauges

CC, CCD and CCQ gate valves for DN35–DN400 have manual, electric or pneumatic drive, a 304 stainless steel body, 316L welded bellows and leak rate ≤1.3×10⁻¹⁰ Pa·m³/s. The ZQJ-2000 helium leak detector finds leaks down to 2×10⁻¹¹ Pa·m³/s, the ZQJ-3200 down to 5×10⁻¹³ Pa·m³/s in vacuum mode.

ZDF-11B5 and ZDF-62B5 compound gauges measure from 1.0×10⁵ to 1.0×10⁻⁵ and 1.0×10⁻⁷ Pa with ±1% accuracy; panel-mount ZDR-12/06B and ZDZ-52T/07B gauges have a 0–5 V analog output.

KYKY Technology manufacturing

KYKY Technology Co., Ltd. was founded in Beijing in 1958; its predecessor was the Beijing scientific instrument center of the Chinese Academy of Sciences. The company built the first turbomolecular pump, commercial helium leak detector and scanning electron microscope in China.

KYKY pumps serve mass spectrometers and surface analyzers, optical filming, panel display and ion etching.

KYKY / KYKY Technology and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of KYKY / KYKY Technology and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.