MUEGGE Microwave Generators and Plasma Sources

MUEGGE is a manufacturer of industrial microwave and plasma equipment based in Reichelsheim, Germany: 915 and 2450 MHz generators, power supplies, magnetrons, plasma sources, plasma tools and waveguide components.

MG030KG and MG050KG 915 MHz microwave generators

MG030KG-511KE and MG050KG-511KE are cabinet generators at 915 MHz rated 30 kW and 50 kW with a switch-mode power supply. They take 480 V three-phase mains, use air and water cooling, have IP54 protection, a WR975 waveguide output and panel, EtherCAT and analog control.

Frequency 915 MHz
Output 30 and 50 kW
Cabinet protection IP54
WR975 waveguide output

MH magnetron heads for 2450 and 915 MHz

Each head is paired with a power supply: MX3000D-170KL goes with three MH3000S versions. MH3000S gives 3 kW at 2450 MHz, pulses up to 6 kW, a coaxial output and a built-in isolator. At 2450 MHz heads span 1.25 kW (MH1250S) to 10 kW (MH010KS); MH0915I gives 75 or 100 kW at 915 MHz.

2450 and 915 MHz
Output 1.25-100 kW
MH3000S pulse up to 6 kW
Isolator in MH3000S head

MX and MC magnetron power supplies

MX switch-mode power supplies have been made since 1998. MX3000D-170KL delivers 3 kW at 2450 MHz from 208 V mains, with CAN bus and analog interfaces in a 484 × 128 × 607 mm housing; MX6000D gives 6 kW. The LC-stabilized MC3000B-115AA is rated 3 kW on 380 V mains.

MX series since 1998
Output 3 and 6 kW
CAN bus and analog
LC-stabilized MC3000B

Industrial magnetrons for 915 and 2450 MHz

L-band magnetrons (915 MHz) are offered from 5 kW to 100 kW, S-band magnetrons (2450 MHz) from 800 W to 15 kW. Besides standard OEM magnetrons, MUEGGE makes conversion magnetrons for existing equipment, such as water-cooled versions. MB2658A-110FH delivers 3 kW at 2450 MHz.

L-band 5-100 kW
S-band 0.8-15 kW
Cooling conversion
MB2658A rated 3 kW

Remote Plasma Source RPS

Made since 2010, the RPS is a turnkey microwave system for vacuum chambers: a 2.45 GHz magnetron, waveguide and antenna, with ignition in a ceramic cup and no argon needed. Tested at 1-6 Torr, 500-5000 sccm and 400-3000 W, reflected power stays below 5% in the 2-3 kW range.

Frequency 2.45 GHz
Power up to 3 kW
Pressure 1-6 Torr
Reflection below 5%

Plasma arrays and atmospheric plasma sources

MA4000Y plasma arrays for etching and deposition cover a 320 × 320 mm area at 2-3 kW and 2450 MHz; the twin version covers 338 × 408 mm. The MA6000A atmospheric source is rated 6 kW at 2450 MHz, MA075KA 75 kW at 915 MHz, and the MA100KD downstream source 100 kW at 915 MHz.

Area 320 × 320 mm
Array 2-3 kW
Atmospheric up to 75 kW
Downstream 100 kW

Decapsulation and stripping plasma tools

MA3000D decapsulation tools are built for high-volume production: a 320 × 320 mm chamber, 400 V mains and up to six process gases such as O2, N2, CF4, SF6 and Ar. The R&D MA1250D tools and MA0000D stripping tools have a 245 × 245 mm chamber and run on 208 or 480 V.

Chamber 320 × 320 mm
Up to six gases
R&D chamber 245 mm
Mains 208-480 V

Waveguide components: autotuners, circulators, loads

MUEGGE and MUEGGE-Gerling build waveguide parts for 915 MHz, 2450 MHz and 5.8 GHz generators in WR159 to WR975. The MW2005H-260EC autotuner handles 6 kW in WR340 with a UDR flange, the MW1001B-260CC circulator 100 kW at 915 MHz in WR975, the MW1010E water load 6 kW in WR284.

Sizes WR159-WR975
Autotuner for 6 kW
Circulator for 100 kW
Water load for 6 kW

Selecting MUEGGE microwave equipment by frequency and power

A MUEGGE microwave generator is chosen by process frequency and power.

Generators are made for 2.45 GHz and 915 MHz from 1 kW to 100 kW: at 915 MHz there are the MG030KG and MG050KG cabinets rated 30 and 50 kW and MH0915I magnetron heads rated 75 and 100 kW; at 2450 MHz, MX power supplies paired with MH heads from 1.25 to 10 kW.

For plasma processes there are the 2.45 GHz Remote Plasma Source RPS, MA4000Y plasma arrays for etching and deposition, atmospheric and downstream sources, decapsulation and stripping tools. Waveguide components from WR159 to WR975 and L- and S-band magnetrons complete the transmission line.

Manufacturer and MUEGGE group sites

MUEGGE traces its history to 1979, and MUEGGE GmbH was founded in 1986; headquarters and production are in Reichelsheim (Odenwald, Germany), three buildings with a total area of 3,500 square meters. Since 2020 the company has been owned by HQ Equita.

The group includes Gerling Applied Engineering (Modesto, USA) since 2015, which builds waveguide components under the MUEGGE-Gerling name, the Italian LEANFA since 2022, and MUEGGE Asia Pacific in Singapore, founded in 2023.

MUEGGE and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of MUEGGE and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.