Bronkhorst Precision Gas & Liquid Mass Flow Meters, Thermal Controllers, Digital Pressure Controllers & CEM Vapor Delivery Systems
Direct engineering supply of high-precision fluidics instrumentation, advanced mass flow meters, electronic pressure controllers, and turnkey vapor delivery systems manufactured by Bronkhorst High-Tech B.V. (Netherlands). We provide thermal bypass and direct-flow gas meters, Coriolis mass flow controllers for ultra-low liquid dosing, FLEXI-FLOW compact MEMS multi-parameter instruments, MASS-STREAM rugged IP65 inline meters, ES-FLOW hygienic ultrasonic flow meters, EL-PRESS forward and back pressure regulators, and complete CEM vapor generation systems for semiconductor manufacturing, analytical chromatography, biotechnology, and clean-energy research laboratories.
Bronkhorst Product Lines and Equipment Series
Thermal Gas Mass Flow Meters & Controllers EL-FLOW Prestige
Flagship series of gas mass flow meters and controllers featuring patented dynamic pressure compensation and an on-board database of over 100 gases. Delivers sub-percent accuracy and ultra-stable setpoint control despite line pressure fluctuations.
Flagship series of gas mass flow meters and controllers featuring patented dynamic pressure compensation and an on-board database of over 100 gases. Delivers sub-percent accuracy and ultra-stable setpoint control despite line pressure fluctuations.
- Flow ranges: from 0.014...0.7 mln/min up to 2...100 ln/min
- Accuracy: ±0.5% of reading plus ±0.1% full scale
- Operating pressure: up to 64 bar (optional 100 bar)
- Turndown ratio: 1:150 in standard configuration
- Interfaces: FLOW-BUS, Modbus, PROFINET, EtherCAT, CANopen
Standard Gas Mass Flow Meters & Controllers EL-FLOW Select
Widely deployed modular thermal mass flow series for clean gas applications in laboratory and industrial processes. Available with elastomer seals, metal-to-metal seals for high purity, and explosion-proof housings.
Widely deployed modular thermal mass flow series for clean gas applications in laboratory and industrial processes. Available with elastomer seals, metal-to-metal seals for high purity, and explosion-proof housings.
- Flow ranges: from 0.014...0.7 mln/min up to 8...1670 ln/min
- Sensor technology: bypass capillary thermal sensor in 316L SS
- Control valves: direct-acting solenoid valves F-001, F-002, F-003
- Seals: Viton, Kalrez (FFKM), EPDM, Metal-sealed
- Explosion safety: ATEX Cat.3 Zone 2 and IECEx compliance
High-Precision Coriolis Mass Flow Meters mini CORI-FLOW
True mass flow instruments measuring liquid and gas mass flow independent of fluid properties (viscosity, density, temperature, pressure). Integrate directly with control valves and pumps for ultra-precise micro-dosing systems.
True mass flow instruments measuring liquid and gas mass flow independent of fluid properties (viscosity, density, temperature, pressure). Integrate directly with control valves and pumps for ultra-precise micro-dosing systems.
- Mass flow ranges: from 0.1...5 g/h (M12) up to 6...600 kg/h (M55)
- Accuracy: ±0.2% of reading for liquids, ±0.5% for gases
- Multi-variable output: mass flow, fluid density, temperature
- Pressure rating: up to 200 bar (high pressure option up to 400 bar)
- Actuator integration: direct control of micro-pumps and valves
Multi-Parameter Mass Flow & Pressure Instruments FLEXI-FLOW Compact
Compact instrument based on silicon MEMS sensor technology, combining gas mass flow, inlet/outlet pressure, and temperature measurement. Features ultra-fast response times, small footprint, and optional Bluetooth configuration.
Compact instrument based on silicon MEMS sensor technology, combining gas mass flow, inlet/outlet pressure, and temperature measurement. Features ultra-fast response times, small footprint, and optional Bluetooth configuration.
- Flow ranges: from 0.5 mln/min up to 20 ln/min
- Response time: t98 < 150 ms
- Integrated pressure sensors: up to 17 bar gauge
- Communications: Modbus RTU/ASCII, FLOW-BUS, Bluetooth
- Dimensions: over 35% footprint reduction compared to conventional MFCs
Industrial Direct-Through-Flow Meters MASS-STREAM D-6300
Industrial mass flow meters and controllers using direct-through-flow (inline CTA) technology without bypass capillaries. Resistant to moisture, particulate matter, and contaminants, with rugged IP65 enclosure.
Industrial mass flow meters and controllers using direct-through-flow (inline CTA) technology without bypass capillaries. Resistant to moisture, particulate matter, and contaminants, with rugged IP65 enclosure.
- Flow ranges: from 0.01...0.2 ln/min up to 200...10,000 ln/min
- Ingress protection: IP65 robust housing
- Operating pressure: up to 20 bar (optional up to 100 bar)
- Display: integrated multi-color TFT display with push buttons and trend graphing
- Applications: industrial gas monitoring, burner control, modified atmosphere packaging
Thermal and Ultrasonic Liquid Flow Meters LIQUI-FLOW & ES-FLOW
High-sensitivity flow meters for ultra-low and low liquid flow rates. Features LIQUI-FLOW thermal capillary meters and ES-FLOW ultrasonic meters with a straight, obstructionless tube design.
High-sensitivity flow meters for ultra-low and low liquid flow rates. Features LIQUI-FLOW thermal capillary meters and ES-FLOW ultrasonic meters with a straight, obstructionless tube design.
- Flow ranges: LIQUI-FLOW from 0.04...2 g/h to 20...1000 g/h; ES-FLOW from 2 to 1500 ml/min
- Wetted materials: 316L stainless steel, PEEK, Hastelloy C-22
- Sanitary compliance: 3-A Sanitary Standards, USP Class VI materials
- Operating pressure: up to 100 bar
- Fluid compatibility: DI water, alcohols, acids, solvents, monomers
Digital Electronic Pressure Meters & Controllers EL-PRESS
Electronic forward and back pressure controllers for gases and liquids. Combines a piezoresistive pressure sensor, fast-acting control valve, and digital PID controller in a single compact housing.
Electronic forward and back pressure controllers for gases and liquids. Combines a piezoresistive pressure sensor, fast-acting control valve, and digital PID controller in a single compact housing.
- Pressure ranges: from 2...100 mbar up to 8...400 bar
- Control modes: forward pressure, back pressure, differential pressure
- Accuracy: ±0.5% full scale
- Enclosures: laboratory EL-PRESS and IP65 industrial IN-PRESS
- Media: inert, corrosive, toxic gases, clean and industrial liquids
Controlled Evaporation & Mixing Vapor Delivery Systems CEM
Complete liquid vaporization systems mixing precise liquid precursor flow into a carrier gas stream. Eliminates thermal degradation of heat-sensitive compounds and delivers continuous, pulsation-free vapor generation.
Complete liquid vaporization systems mixing precise liquid precursor flow into a carrier gas stream. Eliminates thermal degradation of heat-sensitive compounds and delivers continuous, pulsation-free vapor generation.
- Liquid flow capacity: from 0.1...2 g/h up to 20...1200 g/h
- Carrier gas flow capacity: from 0.1...5 ln/min up to 4...100 ln/min
- Heater temperature: up to 200 °C (±1 °C stability)
- Vapor stability: coefficient of variation < 1% without droplet pulsation
- Applications: CVD, ALD, thin-film optical coatings, analyzer calibration
Control Valves, Seals & Communication Interface Modules
Genuine components and spare parts for meters and controllers: proportional solenoid control valves, replacement seal kits, piezo valves, connection cables, and digital communication gateway modules.
Genuine components and spare parts for meters and controllers: proportional solenoid control valves, replacement seal kits, piezo valves, connection cables, and digital communication gateway modules.
- Control valves: direct acting F-001AI, F-002AI, F-004AI series, piezoelectric actuators
- Seal kits: genuine O-rings in FFKM (Kalrez), FKM (Viton), EPDM
- Filters: sintered 316L stainless steel inlet filter cartridges
- Gateways: FLOW-BUS to Modbus RTU/TCP, PROFIBUS DP, PROFINET, EtherCAT, USB converters
- Cables: shielded cable assemblies with M12, 8-pin DIN, Sub-D connectors
Customized Fluidics Engineering, Sizing Calculations, Hydraulic Modeling and Multi-Gas Configuration
Our senior fluidics application engineers execute comprehensive hydrodynamic, aerodynamic, and thermodynamic sizing calculations strictly tailored to your specific process parameters: molecular composition of the process gas or liquid, fluid purity, operating temperature range, inlet line pressure, required downstream setpoint pressure, and allowable differential pressure drop (Delta P). We precisely calculate flow capacity coefficients (Cv and Kv) to size the optimal control valve orifice, eliminating risk of cavitation in liquid streams or choked sonic flow in gases. Wetted body materials (high-grade 316L stainless steel, corrosion-resistant Hastelloy C-22, biocompatible PEEK) and seal compounds (Kalrez FFKM, Viton FKM, EPDM, or all-metal seals) are meticulously selected to guarantee long-term stability and sub-percent measurement repeatability in corrosive, toxic, or ultra-pure atmospheres.
Turnkey Vapor Delivery Systems, Modular Dosing Stations and Custom Gas Blending Manifolds
We supply individual flow and pressure instruments as well as fully integrated, pre-tested skid assemblies, gas blending panels, and automated liquid micro-dosing systems. Key turnkey packages include complete CEM (Controlled Evaporation and Mixing) vapor generation systems combining a thermal or Coriolis liquid meter, carrier gas MFC, high-precision mixing injection valve, and temperature-regulated heating chamber. We also engineer multi-channel gas distribution racks and automated closed-loop micro-dosing stations pairing mini CORI-FLOW Coriolis meters with pulse-free gear or diaphragm pumps. Every skid is pre-assembled, pressure proof-tested, helium leak tested to ultra-high vacuum standards, and verified on certified calibration flow rigs before delivery.
Traceable Metrological Assurance, European Manufacturing Standards and Factory Quality Verification
Every Bronkhorst mass flow meter, electronic pressure controller, and precision valve assembly is manufactured under rigorous ISO 9001 and ISO 14001 certified quality control systems in the Netherlands. Instrumentation complies with ATEX Cat. 3 Zone 2 / IECEx explosion-proof directives, 3-A Sanitary Standards, and USP Class VI biocompatibility regulations. All instruments are delivered with factory calibration certificates traceable to primary international metrological standards, material EN 10204 3.1 test reports, cleanroom packaging certifications, and comprehensive manufacturer warranty coverage.
