Brooks Instrument Precision Flow & Pressure Measurement and Control Solutions
Direct engineering supply of genuine Brooks Instrument (ITW) flow and pressure measurement and control solutions for semiconductor fab, bioprocessing, analytical, chemical, and vacuum systems. Complete portfolio encompassing SLA5800 digital thermal mass flow controllers, ultra-high purity GF40/GF80 Series, Quantim QMC Coriolis low-flow meters, MT3809 armored metal rotameters, Sho-Rate glass flowmeters, and PC100 closed-loop pressure controllers.
SLA5800 Series Thermal Mass Flow Meters & Controllers
High-accuracy digital thermal mass flow meters and controllers SLA5800 Series (SLA5850, SLA5860, SLA5851, SLA5853) engineered for industrial biotechnology, analytical, and advanced process manufacturing.
- Measurement accuracy: ±0.9% of rate (20-100% full scale) or ±0.18% of full scale
- Long-term zero stability: < ±0.2% full scale per year ensuring consistent calibration
- Industrial communication: EtherCAT, PROFINET, Profibus-DP, DeviceNet, Modbus RS-485, Foundation Fieldbus
- Flow capacities: 0.003 sccm up to 2500 slpm (N2 equivalent) at pressures up to 310 bar (4500 psi)
- Sealing options: High-purity metal seals or high-performance elastomers (Viton, Kalrez, Buna-N)
GF Series High-Purity & Fast-Response Mass Flow Controllers (GF40, GF80, GF120)
Brooks GF40, GF80, GF100, and GF120 Series thermal mass flow controllers designed for semiconductor CVD, ALD, etch, solar cell manufacturing, and high-purity industrial gas delivery.
- MultiFlo™ technology: On-site gas and range programmability without physical recalibration or removal
- Fast response dynamics: High-speed flow settling time < 300–500 ms with minimal overshoot
- Ultra-high purity construction: 316L VAR stainless steel body with electropolished surface (Ra ≤ 0.13 µm)
- All-metal seal design: Helium leak integrity rating exceeding 1×10⁻¹⁰ atm·cc/sec
- Semiconductor communication: High-speed EtherCAT, DeviceNet, RS-485, and standard sub-D interfaces
Quantim® Coriolis Low-Flow Mass Flow Controllers & Meters (QMC / QMBC)
Quantim® QMC and QMBC Coriolis mass flow instruments delivering direct mass measurement and precise closed-loop control of liquids and gases at ultra-low flow rates.
- Direct Coriolis measurement: True mass flow sensing completely independent of fluid properties
- Ultra-low flow capability: Measurement ranges from 0.001 kg/h (1 g/h) up to 28 kg/h for liquids and gases
- Exceptional accuracy: ±0.2% of rate liquid mass measurement accuracy
- Multi-variable outputs: Simultaneous real-time readout of mass flow, fluid density, and temperature
- Hazardous area approvals: ATEX, IECEx, FM, and CSA certifications with rugged IP66 enclosures
Sho-Rate™ & GT1600 Glass Tube Variable Area Flowmeters
Precision glass tube rotameters Sho-Rate™ 1350/1355 and GT1600 Series engineered for clear visual flow indication and accurate low-flow gas and liquid metering.
- Tube construction: Heavy-wall borosilicate glass with high optical clarity and safety shield
- Interchangeable floats: 316 stainless steel, glass, sapphire, tungsten carbide, and tantalum
- Integrated flow control: Integral precision needle control valves for fine metering adjustment
- Differential pressure regulators: Compatible with 8800/8900 Series constant differential regulators
- Typical applications: Analytical sampling, gas chromatography, seal purge monitoring, and R&D test benches
GP200 Series Pressure-Based Mass Flow Controllers (P-MFC)
Advanced pressure-based mass flow controllers engineered for precise delivery of low vapor pressure gases and reactive chemical precursors in semiconductor ALD, CVD, and dry etch.
- P-MFC critical flow operating principle: Flow control based on sonic nozzle differential pressure equations
- Thermal decomposition prevention: Non-thermal sensing eliminates precursor breakdown and polymerization
- Condensation immunity: Superior handling of condensable and low-vapor-pressure specialty gases
- Fast-settling dynamics: Closed-loop flow response under 500 ms with sub-percent repeatability
- High-purity metallurgy: Corrosion-resistant electropolished 316L VIM/VAR body with all-metal seals
PC100 Pressure Controllers & XacTorr® Vacuum Capacitance Manometers
High-precision closed-loop pressure controllers and temperature-compensated vacuum capacitance manometers designed for semiconductor chambers, analytical systems, and clean environments.
- Closed-loop control modes: Upstream (inlet back-pressure) and downstream (outlet pressure) control
- XacTorr® capacitance manometers: Gas-independent absolute pressure measurement from 0.1 to 1000 Torr
- Heated sensor options: Sensor temperature control up to 100–200 °C eliminating chemical condensation
- Ultra-clean integrity: All-metal seal wetted paths engineered for high-purity process chemistry
- Mechanical regulators: Series 8600 precision non-relieving and relieving mechanical pressure regulators
Direct Liquid Injection (DLI) & Vapor Delivery Systems (VCS)
Complete chemical precursor vaporization and vapor delivery modules engineered for uniform gas-phase delivery into semiconductor MOCVD, ALD, and CVD process chambers.
- Direct Liquid Injection (DLI): Instantaneous flash vaporization preventing thermal breakdown of sensitive precursors
- Coriolis metering integration: Paired with Quantim Coriolis meters for sub-gram-per-hour dosing accuracy
- Vapor stream stability: Pulse-free consistent vapor concentration delivered into process chambers
- Multi-zone thermal management: Precision heating preventing condensation and premature reactant decomposition
- Applications: Semiconductor ALD/CVD, optical coating deposition, pharmaceutical synthesis, and advanced materials
Gas Factor Sizing Calculations and Flow Instrumentation Selection
Our applications engineering team performs rigorous gas conversion factor calculations, density and viscosity compensations, and pressure drop analysis across process conditions up to 1379 bar and temperatures up to +420 °C. We configure optimal wetted metallurgy (316L VAR/VIM, Hastelloy C-276, Monel, Titanium) and high-integrity seals.
Semiconductor, Biopharmaceutical & Chemical Process Applications
Brooks Instrument solutions are installed in leading semiconductor wafer fabs, photovoltaic manufacturing lines, pharmaceutical bioreactors and fermentation skids, gas chromatography sampling systems, and pilot-scale chemical refining reactors worldwide.
Advanced MultiFlo™ Technology & Sub-Gram Coriolis Metrology
Brooks Instrument technological innovations feature proprietary MultiFlo™ digital configurability, high-frequency Coriolis sensing tubes for flows down to 1 g/h, non-thermal sonic nozzle P-MFC architectures, and heated vacuum capacitance manometers XacTorr® with superior zero stability.
NIST-Traceable Factory Calibration & Global Certifications
All Brooks Instrument flow and pressure meters undergo 100% individual multi-point factory calibration on automated test benches with full traceability to NIST and ISO 17025 standards. Products comply with hazardous area approvals (ATEX, IECEx, FM, CSA), pressure equipment directives (PED/ASME), SEMI cleanliness standards, and SIL 2 functional safety certifications.
Lifecycle Engineering Support and Fast-Track Spare Parts Supply
We deliver complete engineering support throughout the entire operational lifecycle of Brooks Instrument equipment, from initial specification verification and digital bus configuration (EtherCAT, Profibus, Modbus) to on-site commissioning and rapid delivery of sensor kits, Kalrez elastomer packs, and control valves.
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