KOFLOC mass flow controllers

Technical selection of KOFLOC mass flow controllers and meters 3660, 8700, EX-250S, 5100 and ST-500, RK1200 float flow meters, needle valves, pressure regulators and gas generators.

Model 3660 mass flow controllers and 3760 meters

The base KOFLOC line: the 3660 mass flow controller and the 3760 mass flow meter with the same range. Full scale runs from 10 SCCM to 100 SLM in N2 equivalent, with accuracy of ±1–1.5% F.S. For a replacement we match gas, range and signal from the nameplate.

Full scale 10 SCCM to 100 SLM
Accuracy ±1–1.5% F.S.
3760 meter, same range
Factory calibration on N2

Model 8700 digital MFC and MFM with display

The 8700 series is a mass flow controller or meter with a built-in display showing instant and totalized flow and alarm settings. Full scale runs from 10 SCCM to 100 SLM, with RS485 and a 0–5 V DC signal switchable to 4–20 mA. The PSK-85CE AC adapter powers it.

Full scale 10 SCCM to 100 SLM
0–5 V or 4–20 mA signal
RS485 communication
PSK-85CE AC adapter

Compact digital EX-250S and all-metal EX-550

The EX-250S covers 5 SCCM to 10 SLM with ±1% F.S. accuracy, and the metal-sealed EX-550 covers 10 SCCM to 5 SLM. Response is within 1 s across the range, and the gas type is selected with a rotary switch. Power is ±15 V or 24 V DC, with RS485 communication.

EX-250S range 5 SCCM–10 SLM
EX-550 range 10 SCCM–5 SLM
Response within 1 s
Power ±15 V or 24 V DC

Models 3200, 5100 and ST-500 for low flows

The 3200 and 5100 control from 1 SCCM to 20 SLM, and the diaphragm seat valve reduces dead volume; the 5100 adds metal seals. The pressure-insensitive ST-500 holds 10 SCCM to 30 SLM regardless of pressure fluctuations, and the ST-550 adds RS485, DeviceNet or EtherCAT.

3200 and 5100 from 1 SCCM
Upper range 20 SLM
ST-500 up to 30 SLM
RS485, DeviceNet, EtherCAT

PSK-FB power supplies and CR-400B, DPM-3 readouts

PSK-FB units power KOFLOC controllers and meters: the 1FB, 3FB and 6FB types supply 1, 3 and 6 systems. The PSK-85CE adapter fits the 8700 series and the PSK-83CE fits the EX-700R. The CR-400B adds power, flow display, alarms and valve open/close over RS-485 or 0–5 V DC.

PSK-FB for 1, 3 or 6 units
PSK-85CE for 8700 series
DPM-3 flow indicator
CR-400B: RS-485 and 0–5 V

RK1200, RK1812 and RK1600R float flow meters

The RK1200 with a precision needle valve measures gas from 5 mL/min to 100 L/min and water from 5 mL/min to 2 L/min with ±2% F.S. accuracy. The RK1812 and RK1814 add a photosensor alarm for gas from 50 mL/min to 50 L/min, and the RK1600R purge meter covers 1 to 20 L/min.

Gas 5 mL/min to 100 L/min
RK1200 accuracy ±2% F.S.
RK1812 photosensor alarm
RK1600R purge to 20 L/min

2412 needle valves, 2204 flow controllers, 3000 valves

The 2412 and 2412M needle valves with a non-rotary needle control gas from 5 mL/min to 100 L/min at 0.1 MPa differential pressure; the 2412M adds a dial scale. The 2204 holds 10 mL/min to 10 L/min against inlet pressure changes. The 3000 proportional valve draws max. 2 W.

Gas 5 mL/min to 100 L/min
2204 up to 10 L/min
3000 valve max. 2 W
Hysteresis within 15%

6600, 6610 and 6800 pressure regulators

The 6600 precision regulator holds outlet pressure from 0.01 to 0.6 MPa at 10 or 20 L/min with ±1% repeatability. The 6610 covers low pressure from 0.01 to 0.15 MPa at 5 L/min with a grease-less gas path. The 6800 backpressure regulator holds inlet pressure from 0.01 to 0.6 MPa.

6600 range 0.01–0.6 MPa
Repeatability ±1%
6610 low range to 0.15 MPa
6800 backpressure to 10 L/min

Choosing a KOFLOC mass flow controller by range and interface

KOFLOC builds thermal mass flow controllers and meters for semiconductors, optic fibers, analyses and fuel cells. The base 3660 and 3760 series and the 8700 series with display cover full scales from 10 SCCM to 100 SLM, and the HFC-303 covers 100 to 1000 SLM.

For low flows the 3200 and 5100 control from 1 SCCM to 20 SLM, and for gas panels the ST-500 holds up to 30 SLM regardless of pressure fluctuations. The compact EX-250S and all-metal EX-550 change gas type with a rotary switch and communicate over RS485.

Float flow meters, needle valves and pressure regulators

RK1200 float flow meters with a needle valve measure gas from 5 mL/min to 100 L/min and water from 5 mL/min to 2 L/min, and the RK1812 and RK1814 add a photosensor alarm. The 2412 and 2412M needle valves, the 2204 flow controller and the 3000 proportional valve set gas flow.

The 6600 and 6610 regulators hold outlet pressure from 0.01 to 0.6 MPa and up to 0.15 MPa, while the 6800 backpressure regulator holds inlet pressure. PSK-FB power supplies for 1, 3 and 6 units and the CR-400B readout power the mass flow controllers.

Gas generators and gas mixers

KOFLOC builds nitrogen, oxygen, ozone, hydrogen and clean dry air generators. The compact Mini-CUBE nitrogen generator offers 99 to 99.999% purity at up to 0.5 MPa discharge pressure, and the small MOX oxygen generators deliver 4 and 8 NL/min.

The KOH hydrogen generator produces 99.999% hydrogen by water electrolysis, and the MPZ ozone generator uses oxygen concentrated from air with the PSA system. The BRENDA gas mixture device uses KOFLOC mass flow controllers for 10 SCCM to 50 SLM per line and 100 SLM in total.

KOFLOC and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of KOFLOC and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.