Henniker Plasma Vacuum and Atmospheric Surface Treatment Systems
UK manufacturer Henniker Plasma designs and produces advanced low-pressure and atmospheric plasma treatment systems engineered for precision cleaning, surface activation, and functional nano-coatings.
Henniker HPT-100 and HPT-200 Benchtop Vacuum Plasma Cleaners
Henniker HPT-100 and HPT-200 benchtop vacuum plasma cleaners provide precision surface activation, cleaning, and etching. Systems feature intuitive touchscreen control, digital MFC channels for O2, Ar, and N2, and variable 13.56 MHz RF power up to 200W for sensitive substrates.
- Industrial 13.56 MHz RF plasma generator with variable output power from 0 to 200W.
- Stainless steel vacuum process chamber with 100mm diameter and flat loading tray.
- Digital mass flow controllers (MFC) with onboard multi-gas mixing manifold.
- Organic hydrocarbon decontamination and surface activation for PDMS and metals.
Henniker HPT-300 and HPT-500 Deep-Chamber Benchtop Plasma Systems
Henniker HPT-300 and HPT-500 extended benchtop plasma systems process large substrates and semiconductor wafer cassettes. The cylindrical chamber with depths up to 500mm features removable shelving, pulsed RF generator modes, and corrosion-resistant seals for aggressive plasma chemistries.
- Extended cylindrical chamber depth up to 500mm accommodating wafer cassettes and 3D parts.
- Multi-tier removable perforated shelves in stainless steel or anodized aluminum.
- Pulsed RF plasma mode for low-temperature treatment of temperature-sensitive polymers.
- Compatible with chemical-duty rotary vane and dry vacuum pumps utilizing PFPE fluids.
Henniker Nebula Industrial Vacuum Plasma Treatment Systems
Henniker Nebula industrial vacuum plasma systems deliver high-throughput batch cleaning, surface activation, and functional nano-coatings. Featuring 50 to 150-liter rectangular chambers, systems utilize industrial PLC touchscreens, rotary drums for bulk components, and monomer vapor inlets.
- Large format vacuum chamber capacities ranging from 50 to 150 liters for industrial batches.
- Industrial PLC system with color HMI touchscreen and multi-user recipe parameter logging.
- Optional rotating perforated drum ensuring uniform tumble treatment of loose small parts.
- Controlled monomer vapor delivery system for functional nano-scale plasma polymerization.
Henniker Cirrus, Nimbus, and Altus Atmospheric Plasma Torches
Henniker Cirrus, Nimbus, and Altus atmospheric plasma systems provide in-line surface activation without requiring a vacuum chamber. Operating on clean dry compressed air (CDA), plasma nozzles dramatically boost the surface energy of polymers, metals, and composites prior to adhesive bonding.
- Cirrus compact single-nozzle plasma torch providing a 10 to 12mm localized treatment band.
- Nimbus dual-nozzle system for simultaneous double-sided or wider treatment of moving webs.
- Altus multi-nozzle array combining 4 to 8 torches for continuous assembly lines up to 100mm.
- Operates entirely on standard clean dry compressed air at 5 to 8 bar without process gases.
Henniker Stratus Turnkey Robotic Atmospheric Plasma Manufacturing Cells
Henniker Stratus turnkey robotic manufacturing cells combine atmospheric plasma torches with 3-axis motion control. Delivering automated surface preparation across working areas from 200x200mm to 800x1200mm, cells feature intuitive teach-pendants storing hundreds of part routines.
- Integrated 3-axis robotic gantry manipulator driven by precision closed-loop servomotors.
- Working envelope choices from 200x200x100mm up to 800x1200x150mm for complex molded parts.
- Handheld teach-pendant interface allowing rapid contour digitizing and trajectory storage.
- Enclosed interlocked safety housing with integrated exhaust extraction ducting.
Henniker HPT-100 TEM Specialized Electron Microscopy Plasma Cleaner
The specialized Henniker HPT-100 TEM plasma cleaner provides non-destructive hydrocarbon decontamination of specimen holders and grids for TEM and SEM electron microscopy. Operating with low-power argon and oxygen plasma, it eliminates carbon contamination without altering delicate grid membranes.
- Custom vacuum re-entrant adapters accepting JEOL, FEI/Thermo Fisher, and Hitachi TEM holders.
- Precision variable RF power generator from 0 to 100W protecting fragile carbon/graphene films.
- Dual digital MFC gas channels for calibrated mixing of high-purity argon and oxygen process gases.
- Prevents beam-induced hydrocarbon deposition during high-resolution sub-nanometer imaging.
Engineering Principles and Industrial Applications of Henniker Plasma Systems
UK manufacturer Henniker Plasma designs and produces low-pressure vacuum and atmospheric plasma systems serving advanced engineering sectors: semiconductor fabrication, biomedical devices, aerospace composites, microfluidics, and automotive electronics.
Plasma surface treatment delivers exceptional surface energy enhancement and molecular-level cleaning without hazardous chemical solvents or abrasive grit blasting.
The comprehensive portfolio encompasses compact benchtop HPT plasma cleaners, industrial-scale Nebula vacuum batch chambers, high-velocity atmospheric Cirrus and Nimbus nozzles, and turnkey automated 3-axis Stratus robotic cells.
Physicochemical Mechanisms of Plasma Cleaning and Surface Functionalization
During cold plasma processing, a 13.56 MHz radio-frequency electromagnetic field ionizes process gases such as oxygen, argon, nitrogen, and forming gas mixtures into energetic ions, free radicals, and vacuum ultraviolet photons.
Oxygen radicals break covalent hydrocarbon bonds on substrates, converting organic contaminants into volatile gas byproducts pumped away continuously.
Concurrently, polar functional groups (carbonyl, carboxyl, hydroxyl) are chemically grafted onto inert polymer backbones like PTFE, PEEK, PDMS, and polyimide, dramatically decreasing contact angles and ensuring robust adhesive bonding.
System Configuration Matrix: HPT Benchtop Units, Nebula Chambers, and In-line Cells
Selecting the ideal Henniker configuration depends on component dimensions, cycle times, and manufacturing line integration.
R&D laboratories and analytical cleanrooms benefit from compact HPT-100 and HPT-200 benchtop chambers featuring recipe-driven touchscreens and dual digital mass flow controllers.
High-volume industrial manufacturing facilities utilize Nebula rectangular chambers with multi-shelf loading or tumble-action rotary drums for bulk electronic hardware.
For continuous web converting or high-speed robotic dispensing, Cirrus atmospheric torches and Stratus 3D automated manufacturing cells deliver seamless line integration.
Henniker Plasma and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of Henniker Plasma and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.
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Documents and sources
- Official Henniker Plasma portal: vacuum and atmospheric plasma surface treatment systems
- Manufacturer product brochure for Cirrus and Nimbus atmospheric plasma systems detailing global installation base
- Technical specifications for Henniker HPT-100 and HPT-200 benchtop vacuum plasma systems
- Dedicated TEM and SEM sample holder plasma cleaner specifications for HPT-100 TEM
- Industrial large format vacuum plasma treatment systems specifications for Henniker Nebula
- Engineering specifications for Henniker Cirrus and Altus atmospheric plasma torches
- Engineering documentation for Henniker Stratus turnkey robotic atmospheric plasma manufacturing cells
- Surface energy measurement equipment and Dyne test fluids overview
