AdvanTorr / King Lai Vacuum Valves and UHV Components
Direct supply of AdvanTorr ultra-high and high vacuum components by King Lai Group for semiconductor manufacturing, thin-film deposition, and scientific vacuum instruments worldwide.
ConFlat (CF) Ultra-High Vacuum Flanges
AdvanTorr King Lai ConFlat CF flanges engineered from 304L and 316LN ESR stainless steel deliver reliable ultra-high vacuum sealing down to 1x10-10 Torr with OFHC copper gaskets. Rotatable and fixed sizes from 1.33 to 16.5 inches bake up to 450 C. Helium leak tested.
- 304L & 316LN ESR steel
- Vacuum to 1×10⁻¹⁰ Torr
- OFHC copper seals
- Sizes 1.33" to 16.5"
Quick-Release KF and ISO Flanges
AdvanTorr King Lai KF and ISO flanges deliver quick assembly for high vacuum process lines. Manufactured from 304L and 316L stainless steel, the 15-degree taper design secures elastomer seals with aluminum wing-nut clamps. Systems achieve vacuum down to 1x10-8 Torr.
- Sizes NW16 to NW50
- ISO-KF & ISO-K standards
- FKM elastomer O-rings
- Tool-free wing-nut clamp
Vacuum Gate Valves and SMART Valves
AdvanTorr King Lai vacuum gate valves isolate process chambers and safeguard turbomolecular pumps. The SMART Gate Valve design integrates vibration-damping linkages to prevent particle generation during cycling. Both manual and pneumatic versions feature positive position locks.
- SMART low-vibration design
- Pneumatic & manual actuation
- Ultra-low particle count
- Lock in open/closed states
L-Motion Slit Transfer Valves
AdvanTorr King Lai L-Motion slit valves are engineered for semiconductor load-locks and substrate transfer chambers. The L-Motion mechanism presses the gate seal perpendicular to the seat without rubbing, eliminating seal wear. The assembly exceeds one million trouble-free cycles.
- L-Motion frictionless seal
- SEMI wafer transfer design
- Over 1 million cycles life
- Integrated position sensors
Vacuum Angle and Inline Valves
AdvanTorr King Lai angle and inline valves feature CF, KF, and ISO flange terminations for versatile line routing. Heated body configurations prevent precursor condensation during semiconductor ALD and CVD cycles. Welded stainless bellows protect the actuating stem.
- Pneumatic & manual actuation
- Heated body option for CVD
- Welded bellows stem seal
- KF16 to NW50 and CF ports
Flexible Bellows and Vacuum Fittings
AdvanTorr King Lai flexible bellows and line fittings isolate turbomolecular and roughing pump vibrations while absorbing thermal expansion. Fabricated from 316L stainless steel, options include tees, crosses, and reducers. All assemblies undergo strict helium leak testing.
- Formed 316L bellows hoses
- Pump vibration isolation
- CF-KF-ISO adapter fittings
- 100% helium leak inspected
Kodial Viewports and Protective Shutters
AdvanTorr King Lai zero-length profile viewports mount flush without protruding beyond the flange face, preventing handling damage. High-purity optics in Kodial borosilicate, fused silica, and sapphire are vacuum-brazed to stainless flanges, supported by internal protective shutters.
- Zero-length flush design
- Kodial, silica & sapphire
- Vacuum-brazed glass-metal
- Rotary protective shutters
Vacuum Chambers and Chemical Bubblers
AdvanTorr King Lai custom process chambers and chemical bubblers are assembled within Class 100 and Class 1,000 cleanrooms for ALD and CVD tools. Stainless steel precursor bubblers comply with the DOT 4B specification. Chambers integrate quick-access doors and precision sensor ports.
- Class 100/1,000 cleanrooms
- DOT 4B compliant vessels
- Quick-access door seals
- Electropolish Ra < 0.13 um
Technical Standards of AdvanTorr King Lai UHV Components
King Lai Group engineers and manufactures a comprehensive portfolio of AdvanTorr vacuum hardware for semiconductor fabrication, thin-film deposition, and surface analysis systems.
Components are precision-machined from ultra-clean 304L and 316LN ESR stainless steels with strict inclusion control. All parts are ultrasonically cleaned and sealed in Class 10,000 cleanrooms with individual heat and lot traceability.
SMART Gate Valves and L-Motion Transfer Technology
AdvanTorr SMART Gate Valves and L-Motion slit valves are engineered to minimize particle shedding during substrate transfer in semiconductor load locks and cluster tools.
The frictionless dual-step closing action eliminates seal scuffing against the valve seat, extending service life beyond one million cycles. Built-in position switches ensure seamless integration into automated tool controllers.
AdvanTorr / King Lai and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of AdvanTorr / King Lai and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.
