Granville-Phillips Vacuum Gauges and Controllers

Precision vacuum gauges, sensor heads and controllers by Granville-Phillips (MKS Instruments) for semiconductor manufacturing, coating systems and research chambers: selected by part number and flange.

Granville-Phillips 275 Convectron convection-enhanced vacuum gauges

Thermal convection-enhanced Pirani sensors of Series 275 measure pressure from atmosphere (1000 Torr) to 10^-4 Torr. Utilizing convection heat transfer, these gauges outperform standard thermocouple sensors. Factory calibration delivers high stability across all cycles.

Measurement span from atmosphere down to 10^-4 Torr for foreline monitoring
Individual factory calibration of each gauge tube eliminates field adjustments
Vacuum fittings include KF16, KF25, KF40, ConFlat CF35 and male NPT ports
Rapid millisecond thermal response time for automated pumpdown tracking

Granville-Phillips 370 Stabil-Ion high vacuum hot cathode gauges

Precision Bayard-Alpert hot cathode ionization gauges built with an all-metal envelope. This rugged design eliminates glass breakage, helium permeation and thermal deformation. The gauge serves analytical instruments, semiconductor process tools and research chambers.

All-metal welded construction without fragile glass components or seals
Wide measuring range from 10^-2 to 10^-11 Torr for ultra-high vacuum vessels
Rigid electrode geometry preventing microphonic drift and thermal shifting
Low outgassing rates and long-term retention of factory calibration data

Granville-Phillips 355 Micro-Ion miniature Bayard-Alpert sensors

Miniature hot-cathode Bayard-Alpert sensors occupying a fraction of standard tube volume. Lower operating power generates less thermal radiation into the vacuum environment. Dual filaments extend service intervals on process exhaust lines and semiconductor load locks.

Ultra-compact internal volume under 10 cm3 for tight manifold installations
Dual filament assembly with automatic or manual switchover upon filament wear
Available with yttria-coated iridium or tungsten emitters for active gases
Operating range from 5*10^-2 down to 10^-9 Torr with low heat generation

Granville-Phillips 423 I-Mag inverted magnetron cold cathode sensors

Cold cathode vacuum sensors featuring an inverted magnetron discharge geometry without a filament. These robust units cannot burn out upon sudden atmospheric inrushes and resist hydrocarbon contamination. Ideal for industrial vacuum coaters and high vacuum pumping carts.

No filament structure prevents damage from unexpected venting or air surges
Dismountable sensor body allowing mechanical cleaning of internal anodes
Measuring span from 10^-2 down to 10^-11 Torr across high vacuum systems
High resistance to oil backstreaming, sputtering vapors and particulates

Granville-Phillips 307 and 475 vacuum system controllers and readouts

Hardware modules supplying power, analog signal processing and digital readouts for Convectron, Micro-Ion and Stabil-Ion gauges. Controllers incorporate programmable process control relays, analog log outputs and RS-232/485 communication ports for automated process lines.

Series 307 controller runs up to two Convectron gauges plus one ion sensor
Series 475 compact panel readout for single or dual 275 convection heads
Configurable setpoint relays for pump interlocks, valve safety and isolation
Equipped with RS-232, RS-485 and 0-10 V analog outputs for PLC integration

Granville-Phillips interconnecting cables, vacuum flanges and hardware

Shielded sensor interconnect cables, vacuum flanges and hardware matching gauges to system controllers. Heat-resistant insulation and secure bayonet connectors eliminate noise from RF plasma generators and high-voltage power supplies across modern cleanroom production tools.

Convectron gauge cables from 3 to 30 meters with dual electrostatic shielding
High-voltage bakeable cables for Series 370 Stabil-Ion and Series 307 setups
Vacuum adapter flanges in KF16, KF25, CF16, CF35, female VCR and NPT fittings
Replacement filament assemblies, bakeable gaskets and calibration memory keys

Granville-Phillips vacuum measurement architecture and instrumentation

Granville-Phillips products by MKS Instruments represent leading indirect vacuum measurement technology for semiconductor fabrication, vacuum coating systems, analytical instruments and surface science laboratories.

Spanning pressure ranges from atmospheric pressure (1000 Torr) down to ultra-high vacuum (10^-11 Torr), the portfolio integrates Convectron convection-enhanced Pirani gauges, miniature Micro-Ion modules, all-metal Stabil-Ion Bayard-Alpert gauges, and inverted magnetron cold cathode sensors.

The instrumentation is renowned for repeatable factory calibration, excellent thermal stability and reliable operation on industrial production lines.

Operational principles of convection and hot-cathode ionization sensors

Series 275 Convectron gauges leverage thermal conductivity combined with natural convection to extend Pirani measurement up to atmospheric pressure.

In high and ultra-high vacuum regimes, Bayard-Alpert hot-cathode sensors ionize gas molecules via regulated electron emission, measuring pressure through collecting the generated positive ions.

Stabil-Ion gauges incorporate a rigid all-metal envelope that eliminates glass breakage and maintains precise electrode spacing during bakeout. For environments exposed to venting, Series 423 I-Mag cold cathode sensors operate without filaments, resisting physical destruction.

Vacuum fittings, mounting orientation and shielded cable assemblies

Proper sensor installation requires strict adherence to vacuum flange specifications and spatial mounting guidelines. Convectron gauges must be mounted horizontally to ensure correct convection currents across the sensing wire.

Standard vacuum connections include ISO-KF (KF16, KF25, KF40), ultra-high vacuum ConFlat flanges with copper gaskets (CF16, CF35), and female VCR metal gasket fittings.

Low-noise shielded interconnect cables with rugged bayonet connectors link sensor heads to Series 307, 350 and 475 controllers, shielding weak measurement signals from RF and plasma interference.

Routine maintenance, sensor cleaning and filament management

Extended service in sputtering or plasma tools leads to deposition of dielectric or conductive layers on sensor electrodes. Series 423 I-Mag cold cathode gauges feature a fully dismountable body for periodic solvent immersion and mechanical cleaning of the anode assembly.

Micro-Ion Series 355 gauges feature dual filament designs: if the primary filament burns out during an automated cycle, the controller switches over to the secondary filament without breaking chamber vacuum.

Regular inspection of emission current and filament resistance avoids unplanned shutdowns of semiconductor cluster tools.

System integration and automated vacuum interlock control

Granville-Phillips multi-channel controllers (Series 307, 475, 937B and 946) provide signal conditioning and process interlock logic.

Programmable setpoint relays automate vacuum sequencing: energizing turbomolecular pumps once roughing threshold is achieved, actuating isolation gate valves, and interlocking substrate heaters against pressure surges.

Analog log outputs (0-10 V) and RS-232/485 serial ports deliver real-time vacuum telemetry to central programmable logic controllers, supervisory control systems, and automated data acquisition platforms.

Component selection, technical verification and worldwide quotation

SpareX provides engineered selection and delivery of Granville-Phillips vacuum gauges, sensor heads, power supplies, controllers and interconnecting cables for industrial manufacturers and research facilities.

Technical selection is conducted based on equipment model codes, flange types, controller part numbers and nameplate photographs.

Standard industrial configurations, bakeable high-temperature cables and vacuum adapters are supported with complete technical documentation, transparent quotations and reliable global logistics.

Granville-Phillips and model names are trademarks of their respective owners and are used only to identify the equipment for which we source parts. SpareX is not an official dealer, distributor or representative of Granville-Phillips and is not affiliated with the trademark owner. Origin, documents and warranty are stated for each item in the quotation.