Oxford Instruments Ultim Max Infinity SDD Energy Dispersive X-ray Spectrometry (EDS) Systems
The next-generation Ultim Max Infinity Silicon Drift Detector (SDD) range unlocks extreme sensitivity, speed, and analytical precision for qualitative and quantitative EDS microanalysis in SEM and FIB-SEM environments. Combining large-area sensor geometries with state-of-the-art pulse processing, Ultim Max Infinity delivers outstanding light-element detection (Beryllium to Plutonium) and live chemical imaging at count rates exceeding one million counts per second without pulse pile-up artefacts.
- Active sensor crystal areas: 40 mm², 65 mm², 100 mm², and 170 mm² offering uniform spectral resolution
- Guaranteed carbon resolution CKa <= 46 eV at throughputs up to 50,000 cps according to ISO 15632:2021
- Guaranteed manganese resolution MnKa <= 127 eV at ultra-high input count rates up to 200,000 cps
- Windowless Ultim Extreme Infinity series engineered for sub-10 nm nanoanalysis at beam voltages below 2 kV
