Advanced Energy develops power supplies, power control systems and measurement instruments.
Select equipment for the process and load, from an RF system or heating controller to a multichannel power platform.
Product families
Start with the load requirements. Deposition and etching need a generator considered together with its matching network; heating needs a controller and power circuit; electronics need an output-channel configuration. Family ranges guide the initial choice, while the specific model follows the tool documentation. Communication modules and displays can be included with the main equipment.
Apex RF generators
Compact RF power sources for plasma processes, with a frequency of 13.56 MHz, output power of 1.5–10 kW, 208 VAC input and water cooling. Mounting options include installation near the chamber and in a rack.
For etching or deposition, the generator must be selected together with the matching network and process load. State the working power, available space, control interface and cooling arrangement; for an existing tool, include the complete nameplate.
Model, load requirements and connection arrangement
Paramount digital RF power
A digitally controlled RF platform with power and impedance measurement, pulsing and CEX synchronization. The family covers 2–60 MHz and 3–15 kW, with 208/400/480 VAC input versions and combined air and water cooling. These ranges describe the family, so each project needs a specific configuration.
Provide the frequency, power, process mode and required interface: EtherCAT, Ethernet, DeviceNet or RS-232. Integration also depends on the chamber controls and matching network.
Model, load requirements and connection arrangement
eVerest and NavX pulsed system
An integrated RF delivery system for processes using multiple pulse levels. eVerest provides programmable power levels and transitions, while NavX supplies matching and synchronization with the generator. Selection begins with the process requirements rather than a power rating alone.
A project inquiry should include the pulse profile, electrical load characteristics, control requirements and chamber configuration. Specify whether the requirement is a complete delivery system or one device within an existing installation.
Model, load requirements and connection arrangement
Navigator II and Navio matching networks
Matching networks connect an RF generator to its plasma load. Navigator II uses digital tuning control and supports pulsed RF delivery; Navio offers configuration options for impedance matching. Selection requires the operating frequency, power and generator details.
Vacuum capacitors are components of the matching circuit, so a component inquiry differs from a request for a complete network. Include the connection diagram, full device marking and a description of the operating mode.
Model, load requirements and connection arrangement
Pinnacle III Plus+ pulsed DC
A pulsed DC source for reactive magnetron sputtering of dielectric films. Family ranges are 5–350 kHz, 1.5–10 kW and 325–800 V, with air cooling. Frequency and duty cycle are part of the process settings.
For a new tool, state the target material, required power and control interface; for replacement, preserve the complete III Plus+ generation designation and output configuration. Single and dual outputs must be distinguished when specifying the package.
Model, load requirements and connection arrangement
Ascent DMS and AMS II
Ascent DMS addresses dual-magnetron sputtering: 40/60/120 kW models can form configurations up to 240 kW, with frequency selection from 500 Hz to 50 kHz. Control allows adjustment of the power ratio between magnetrons. AMS II is a modular, water-cooled system with arc management.
The choice depends on the tool architecture and process. Provide the number of magnetrons, load characteristics, mains supply, cooling arrangement and required control interface.
Model, load requirements and connection arrangement
Thyro electric heating control
A family of SCR controllers for heating, melting and drying: Thyro-S, Thyro-A, Thyro-A+, Thyro-PX and Thyro-XD. The power unit is selected by current, voltage, phase arrangement and load type. Transformer-fed applications also require transformer data and the control scheme.
PLC communication, the operator display and mounting are specified separately. When replacing a controller in a cabinet, provide the complete nameplate and terminal photographs to preserve its electrical configuration.
Model, load requirements and connection arrangement
BasicBusModule controller groups
A communication module connects up to eight Thyro controllers. The basic version is part 2.000.190.002; the dASM load-optimization version is 2.000.190.003, with 24 VDC supply. An appropriate Anybus module is selected separately for the industrial network.
For a cabinet project, specify controller quantities and families, the required bus and connection lengths. In an existing system, identify the installed module version and the automation functions that an expansion must retain.
Model, load requirements and connection arrangement
Anybus industrial network options
Choose the interface for the control network: PROFINET 2.000.190.011, Modbus TCP 2.000.190.013, EtherCAT 2.000.190.016, Ethernet/IP 2.000.190.015 or Profibus DPV1 2.000.190.010. Modules fit Thyro-PX or BasicBusModule. Thyro-S, Thyro-A and Thyro-A+ use the BasicBusModule combination.
Provide the network design and controller model; for a replacement, include the removed module's part number. This links the interface package to the actual cabinet architecture and preserves the intended communication arrangement.
Model, load requirements and connection arrangement
Thyro displays and mounting kits
Thyro-Touch 2.000.590.001 and Thyro-A+ Display 2.000.790.001 provide configuration and indication. Cabinet-door kits are Thyro-PX 2.000.000.405 and Thyro-A+ 2.000.790.002, including a frame and 2.5 m cable. Distinguish a standalone display from its mounting kit in the inquiry.
Provide the controller model, installation location and a photograph of the door cutout; for refurbishment, list the retained items so the required package can be specified.
Model, load requirements and connection arrangement
Artesyn and Excelsys configurable supplies
Equipment with several power rails can use CoolX, iMP, iVS, NeoPower, Ultimod, uMP, XF and Xgen platforms. A shared chassis houses output modules for individual loads. Selection starts with a table of voltages and currents for every consumer, plus isolation and cooling requirements.
State the input supply, available space and control needs as well. Replacing a complete assembly requires its full configuration code; replacing one channel requires its output-module marking.
Model, load requirements and connection arrangement
CoolMods and PowerMods output channels
Output modules define a multichannel power configuration. CoolMods belong to CoolX600, CoolX1000, CoolX1800 and CoolX3000; PowerMods serve Ultimod, Xgen and XF. Selection requires the platform, module code, slot layout and load parameters.
Include a diagram when outputs are connected in series or parallel. For an expansion, identify the retained channels and the additional consumer, since these determine the module package and the configuration to be assessed.
Model, load requirements and connection arrangement
iHP multichannel power
A modular power platform with up to eight configurable outputs. Air-cooled and liquid-cooled versions are available, with up to 20 kW specified for the liquid-cooled version. A project starts by defining each channel's voltage, current and adjustment range before allocating loads to modules.
Input supply, the cooling circuit and the control interface are also required. For an installed unit, include the rack code, module markings and the load connection diagram.
Model, load requirements and connection arrangement
Impac IGAR 6 Smart pyrometer
A stationary pyrometer with one-color measurement at 100–2550 °C, two-color measurement at 250–2550 °C and automatic Smart switching. Focusable optics help match the measurement to the target size and working distance.
Response time is 2 ms, with a 0/4–20 mA output, InfraWin configuration and RS485 connectivity. Provide the material, temperature range, target size and distance. Also specify the mounting arrangement and whether the instrument will feed a heating control loop.
Model, load requirements and connection arrangement
List each consumer with its voltage, current and operating mode. Add input supply, space, cooling and control interface. RF processes require frequency, chamber parameters and pulse profile. Pyrometers require material, temperature, target size and measuring distance.
These details define the configuration and connections for the application.
Individual modules and complete packages
Request a complete supply, an output module, a Thyro controller, a display, an interface or connection components. Identify retained, added and replaced items. Configurable power needs the platform code, module markings and slot layout.
PLC communication requires the protocol, while a remote display needs a mounting location and connection length.
Send the requirements and package
State quantity, model or application, destination and package: a single unit, chamber power, multiple channels or heating controls. For installed equipment, add marking and connection photographs. Price, lead time and scope are agreed during quotation; compatibility depends on the version and installation. We are neither an authorized dealer nor the manufacturer's representative.
