Ebara industrial centrifugal pumps, dry vacuum systems and OEM spare parts

Supply genuine industrial pumps, high-pressure vertical multistage EVMS units, submersible wastewater pumps and cleanroom dry vacuum systems from Ebara Corporation (Tokyo, Japan).

Centrifugal End-Suction Stainless Steel Pumps Ebara 3M, 3S, 3LS, 3P

Ebara 3M, 3S, 3LS and 3P industrial centrifugal pumps are hydroformed from AISI 304 (3M) and AISI 316L (3LS/3P) stainless steel complying with EN 733 (DIN 24255), engineered for industrial water supply, cooling towers, heat exchangers, CIP cleaning systems and chemical circulation with hydraulic

efficiency up to 82%.

Flow rates up to 132 m³/h, head up to 95 m, maximum housing working pressure 10 bar
Liquid operating temperature range from -10°C to +110°C (up to +120°C with high-temp FPM/PTFE seals)
Back pull-out design allowing motor and impeller inspection without disconnecting suction/discharge piping
Spare parts: AISI 304/316L impellers, SiC/SiC/FPM mechanical shaft seals, housing O-rings, standard drive bearings

Single and Dual Impeller Monobloc Pumps Ebara CDX, 2CDX, CDXM

Ebara CDX (single-stage) and 2CDX (twin-impeller) monobloc centrifugal pumps feature AISI 304 stainless steel hydroformed housings and closed impellers, designed for industrial washing machines, machine tool coolant feed, water treatment and pumping moderately aggressive process liquids.

Flow rates from 1.2 to 15 m³/h, head up to 71 m (2CDX series), maximum operating pressure 8 bar
Fluid operating temperature from -5°C to +90°C (extended temperature H version up to +110°C)
Compact close-coupled monobloc assembly driven by high-efficiency IE3 electric motors
Spare parts: AISI 304 diffusers, primary/secondary impellers, Ceramic/Carbon/NBR and SiC mechanical seals

Vertical Multistage In-Line Pumps Ebara EVMS, EVMSG, EVMSL with Shurricane® Impellers

Ebara EVMS vertical multistage in-line centrifugal pumps feature the patented Shurricane® impeller profile that reduces axial thrust forces by 80%, preserving motor bearings under extreme discharge pressures in boiler feed, reverse osmosis, high-rise boosting and industrial fire protection.

Flow rates up to 84 m³/h, head up to 250 m (housing pressure rating up to 25/30 bar), sizes from EVMS1 to EVMS20
Liquid temperature capability from -30°C to +140°C, handling glycol mixtures, softened water and condensate
Cartridge mechanical seal enabling quick seal replacement without dismantling the heavy drive motor
Spare parts: plug-in cartridge mechanical seals, Shurricane® impellers, intermediate stage chambers, spline shafts

Horizontal Multistage Stainless Steel Pumps Ebara Matrix and CVM

Ebara Matrix (all AISI 304 stainless steel) and CVM (gray iron bracket) horizontal multistage centrifugal pumps are engineered for quiet operation, boosting and fluid handling in industrial chillers, membrane filtration, glycol loops and industrial boiler feeding.

Flow rates from 1.2 to 27 m³/h, head up to 104 m, maximum housing design pressure 10 bar
Liquid operating temperature from -15°C to +85°C (high-temperature configurations up to +110°C)
High hydraulic efficiency with low acoustic noise emissions and minimal pressure pulsations
Spare parts: stage diffusers, stainless steel impellers, Ceramic/Carbon mechanical seal assemblies, outer sleeves

Submersible Drainage, Sewage and Waste Water Pumps Ebara Best One, Best, DW, DML

Ebara stainless steel (Best One, Best 2-5, DW) and gray iron (DML, DLS, DS) submersible pumps are built for pumping drainage, gray water, sewage and industrial slurry containing suspended solids up to 50 mm, equipped with dual mechanical seals in an oil chamber for reliable continuous operation.

Flow rates up to 54 m³/h (DW series) and 300 m³/h (heavy DML series), head up to 22 m, immersion depth 10 m
Dual mechanical shaft seals inside oil bath: SiC/SiC product-side and Carbon/Ceramic motor-side protection
Impeller configurations: single-channel, non-clogging Vortex (VOX) and heavy-duty grinding cutters
Spare parts: Vortex impellers, oil chamber seal pairs, neoprene submersible power cables, magnetic float switches

Dry Vacuum Pumps Ebara EV-S, EV-M, EV-A, ESA for Semiconductor and Cleanroom Processes

Ebara Precision Machinery manufactures multi-stage dry vacuum pumps (EV-S, EV-M, EV-A, ESA series) utilizing multi-lobe Roots and screw compression profiles without oil lubrication, engineered for harsh semiconductor etching, PECVD, ALD, photovoltaic cell and cleanroom coating processes.

Pumping speeds from 100 to 10,000 L/min, ultimate base vacuum pressure down to 0.1 Pa (10⁻³ mbar)
Zero oil backstreaming or hydrocarbon contamination within the process reactor vacuum envelope
Integrated housing heating jackets and nitrogen (N₂) purge gas barriers to eliminate corrosive byproduct deposition
Spare parts: Roots rotor overhaul sets, precision timing gear pairs, ceramic vacuum bearings, purge flow sensors

Genuine Mechanical Seals, Plug-in Cartridges and Repair Kits Ebara

To prevent unpredicted hydraulic plant downtime, Ebara supplies genuine single and cartridge mechanical seals featuring silicon carbide (SiC/SiC), tungsten carbide and graphite sliding faces paired with FPM, EPDM and PTFE elastomers for chemical and thermal endurance under heavy cycling.

Plug-in cartridge seals for EVMS: fast in-line replacement within 15 minutes without motor disassembly
Shaft seals for 3M, CDX and Matrix: standard factory shaft diameters 12, 14, 18, 22, 25 mm
SiC/SiC and Carbon/SiC friction pairs resisting abrasive suspended solids and pressure shocks up to 25 bar
Spare parts: stationary/rotary seal rings, AISI 316 conical springs, chemical-resistant O-rings and clips

Shurricane® Impellers, Spline Shafts, Bearing Assemblies and Hydraulic Spares Ebara

Genuine Ebara replacement hydraulic components restore nominal design efficiency and head-flow curves: patented Shurricane® impellers, precision-ground spline shafts, stainless shaft sleeves, replaceable housing wear rings and laser-welded multistage diffusers.

Shurricane® laser-balanced impellers: minimizing vibration harmonics and runout complying with ISO 1940 G2.5
Spline shafts in high-tensile stainless steel with precision-ground bearing seats and keyways
Replaceable wear rings: restoring volute internal running clearances and mitigating cavitation wear
Spare parts: multi-stage diffusers, stage housings, motor coupling adapters, flange kits and hardware

Equipment identification and Ebara nameplate specification

Ebara Corporation (株式会社荏原製作所, founded in 1912 in Tokyo, Japan) is a foremost global manufacturer of industrial fluid machinery, heavy-duty pumps, dry vacuum systems and municipal environmental engineering solutions.

When sourcing complete pumping units or ordering replacement hydraulic components, always reference the official model nomenclature stamped on the stainless steel nameplate (e.g., 3M 50-160/7.5, EVMS15 6N5/11, CDX 120/20, Best One M, EV-S20P).

The factory code defines essential hydraulic parameters: nominal port diameter, impeller trim diameter, number of pressure stages, mechanical seal materials code and unique serial number. Providing a clear photo of the equipment nameplate guarantees exact OEM compatibility.

Centrifugal stainless steel end-suction pumps Ebara 3M, 3S, 3LS, 3P (EN 733)

Standardized in compliance with EN 733 (DIN 24255), Ebara Series 3 centrifugal pumps are manufactured via specialized deep-drawing hydroforming processes from AISI 304 (3M) and AISI 316L (3LS/3P) austenitic stainless steels, eliminating weld stresses and boosting hydraulic efficiency up to 82%.

Engineered for industrial water circulation, cooling towers, heat recovery systems, CIP washing lines and light chemical applications, these pumps deliver flow rates up to 132 m³/h and discharge heads up to 95 m under operating housing pressures up to 10 bar.

The modular Back pull-out construction allows maintenance crews to remove the electric motor, bracket and impeller without disturbing suction and delivery piping, drastically cutting system downtime.

Close-coupled centrifugal pumps Ebara CDX and 2CDX with closed impellers

Ebara CDX (single impeller) and 2CDX (dual opposite impellers) close-coupled monobloc pumps feature deep-drawn AISI 304 stainless steel housings and laser-welded closed impellers designed for industrial parts washers, machine tool cooling, commercial dishwashing and water filtration.

The twin-stage hydraulic layout of the 2CDX series delivers discharge heads up to 71 m at flow rates from 1.2 to 15 m³/h with maximum allowable housing pressure of 8 bar and fluid temperatures up to +90°C (+110°C in high-temperature H executions with Viton elastomers).

We supply complete CDX/2CDX pump assemblies, AISI 304 diffusers, primary and secondary impellers, mechanical shaft seals and replacement IE3 premium-efficiency electric drive motors.

Vertical multistage in-line centrifugal pumps Ebara EVMS (Shurricane® technology)

The Ebara EVMS vertical multistage pump family (available in gray iron base EVMSG, all-stainless AISI 304 EVMS and high-grade AISI 316L EVMSL versions) incorporates the patented Shurricane® impeller geometry that neutralizes up to 80% of axial hydraulic thrust forces.

By mitigating axial loads on motor bearings, EVMS pumps can be paired with standard universal IEC commercial motors without requiring specialized heavy-thrust bearing configurations. Pumping pressures reach up to 25/30 bar with flow capacities up to 84 m³/h across temperatures from −30°C to +140°C.

Service operations are streamlined through an innovative cartridge mechanical seal that can be replaced in less than 15 minutes through the motor stool access port without uncoupling or hoisting the heavy electric motor.

Horizontal multistage stainless steel pumps Ebara Matrix and CVM

Fabricated entirely from pressed AISI 304 stainless steel, Ebara Matrix horizontal multistage pumps (and gray-iron bracketed CVM models) are engineered for silent, vibration-free pressure boosting in membrane filtration, reverse osmosis, HVAC chiller circuits and boiler feed water.

Delivering discharge heads up to 104 m and capacities up to 27 m³/h at working pressures up to 10 bar, Matrix pumps operate across −15°C to +85°C (up to +110°C in special seal configurations). Hydrodynamically smoothed stage chambers prevent internal recirculation turbulence.

We provide replacement Matrix stage housings, stainless steel impeller kits, intermediate diffusers, outer stainless sleeves and premium ceramic/carbon/silicon carbide mechanical face seals.

Submersible drainage, wastewater and slurry pumps Ebara Best, DW, DML

Ebara manufactures a comprehensive portfolio of submersible pumping equipment: stainless steel AISI 304 drainage units (Best One, Best 2-5), sewage pumps with non-clogging Vortex impellers (DW, DW VOX) and heavy-duty gray iron industrial wastewater pumps (DML, DLS, DS).

To ensure hermetic motor enclosure protection during continuous submergence up to 10 m depth, Ebara equips each industrial submersible pump with dual mechanical face seals housed within an oil lubrication barrier: silicon carbide (SiC/SiC) against abrasive slurry and carbon/ceramic against the motor

stator.

Series DW handles wastewater containing suspended solids up to 50 mm, whereas municipal DML pumps handle flows up to 300 m³/h. We supply Vortex impellers, oil chamber seal pairs, automatic guide rail couplings and submersible power cables.

Dry vacuum pumps Ebara EV-S, EV-M, ESA for semiconductor and cleanroom applications

Ebara Precision Machinery Company is a worldwide premier developer of dry multi-stage vacuum pumps (EV-S, EV-M, EV-A, ESA, ESR series) engineered for critical semiconductor wafer etching, chemical vapor deposition (CVD), photolithography and flat-panel display manufacturing.

Operating without lubricating oil in the vacuum compression chambers via precision non-contact Roots rotors and screw stages, these pumps prevent hydrocarbon backstreaming and provide pumping speeds from 100 to 10,000 L/min with base vacuum down to 0.1 Pa (10⁻³ mbar).

Equipped with integrated nitrogen purge systems (N₂ Purge) and temperature-controlled housing jackets, Ebara dry pumps prevent condensation of corrosive process byproducts. We supply certified overhaul kits, Roots rotor pairs, timing gears and vacuum sensors.

International equipment export, engineering supply and OEM parts support

We supply Ebara Corporation industrial pumping systems, vertical booster skids, dry semiconductor vacuum equipment and genuine spare parts to engineering contractors, manufacturing plants, water authorities and EPC developers globally.

Our team manages technical model cross-referencing, factory configuration verification, international ocean/air logistics, export documentation and customs clearance.

Submit your process duty point (flow rate, total head, fluid characteristics, temperature) or pump nameplate photograph to receive an authoritative engineering selection and quotation.

Equipment configurations, manufacturing lead times and pricing for Ebara pumps and spare parts are determined individually upon technical request; public price lists are not published by the manufacturer. We operate as an independent supplier, not an exclusive distributor of Ebara.